Abstract

We present a high-optical-throughput infrared Mueller-matrix (MM) ellipsometer for the characterization of structured surfaces and ultrathin films. Its unprecedented sensitivity of about 104 in the normalized MM elements enables studies of the complex vibrational fingerprint of thin organic films under different ambient conditions. The ellipsometer acquires quadruples of MM elements within a few 10 s to min, rendering it interesting for process and in-line monitoring. It uses retractable achromatic retarders for increased signal to noise, and tandem wire-grid polarizers for improved polarization control. We demonstrate several scientific and industry-related applications. First, we determine the 3D profile of μm-sized trapezoidal SiO2 gratings on Si from azimuth-dependent MM measurements. Data modeling based on rigorous coupled-wave analysis is employed to quantify grating structure and orientation. We then monitor polymer relaxation processes with a time resolution of 47 s. Measurements of polymer films as thin as 7.7 nm illustrate the sensitivity of the device. We finally couple a liquid flow cell to the ellipsometer, highlighting the prospects for in situ infrared MM studies of thin films at solid–liquid interfaces.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
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    [Crossref]

2018 (3)

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

A. Mendoza-Galván, L. F. del Río, K. Järrendahl, and H. Arwin, “Graded pitch profile for the helicoidal broadband reflector and left-handed circularly polarizing cuticle of the scarab beetle Chrysina chrysargyrea,” Sci. Rep. 8, 6456 (2018).
[Crossref]

P. Kühne, N. Armakavicius, V. Stanishev, C. M. Herzinger, M. Schubert, and V. Darakchieva, “Advanced terahertz frequency-domain ellipsometry instrumentation for in situ and ex situ applications,” IEEE Trans. Terahertz Sci. Technol. 8, 257–270 (2018).
[Crossref]

2017 (5)

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

T. A. Germer, “Full four-dimensional and reciprocal Mueller matrix bidirectional reflectance distribution function of sintered polytetrafluoroethylene,” Appl. Opt. 56, 9333–9340 (2017).
[Crossref]

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

A. Furchner, A. Kroning, S. Rauch, P. Uhlmann, K.-J. Eichhorn, and K. Hinrichs, “Molecular interactions and hydration states of ultrathin functional films at the solid-liquid interface,” Anal. Chem. 89, 3240–3244 (2017).
[Crossref]

A. Furchner, C. Kratz, D. Gkogkou, H. Ketelsen, and K. Hinrichs, “Infrared-spectroscopic single-shot laser mapping ellipsometry: proof of concept for fast investigations of structured surfaces and interactions in organic thin films,” Appl. Surf. Sci. 421, 440–445 (2017).
[Crossref]

2016 (4)

T. Mu, Z. Chen, C. Zhang, and R. Liang, “Optimal configurations of full-Stokes polarimeter with immunity to both Poisson and Gaussian noise,” J. Opt. 18, 055702 (2016).
[Crossref]

K. Lin, Y. Gu, H. Zhang, Z. Qiang, B. D. Vogt, and N. S. Zacharia, “Accelerated amidization of branched poly(ethylenimine)/poly(acrylic acid) multilayer films by microwave heating,” Langmuir 32, 9118–9125 (2016).
[Crossref]

A. Arwin, A. Mendoza-Galván, R. Magnusson, A. Andersson, J. Landin, K. Järrendahl, E. Garcia-Caurel, and R. Ossikovski, “Structural circular birefringence and dichroism quantified by differential decomposition of spectroscopic transmission Mueller matrices from Cetonia aurata,” Opt. Lett. 41, 3293–3296 (2016).
[Crossref]

W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, “Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016).
[Crossref]

2015 (1)

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

2014 (2)

T. W. H. Oates, T. Shaykhutdinov, T. Wagner, A. Furchner, and K. Hinrichs, “Mid-infrared gyrotropy in split-ring resonators measured by Mueller matrix ellipsometry,” Opt. Mater. Express 4, 2646–2655 (2014).
[Crossref]

F. Carmagnola, J. M. Sanz, and J. M. Saiz, “Development of a Mueller matrix imaging system for detecting objects embedded in turbid media,” J. Quant. Spectrosc. Radiat. Transfer 146, 199–206 (2014).
[Crossref]

2012 (1)

2010 (1)

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

2007 (1)

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

2005 (2)

K. Hinrichs, M. Gensch, N. Nikonenko, J. Pionteck, and K.-J. Eichhorn, “Spectroscopic ellipsometry for characterization of thin films of polymer blends,” Macromol. Symp. 230, 26–32 (2005).
[Crossref]

L. Ionov, A. Sidorenko, K.-J. Eichhorn, M. Stamm, S. Minko, and H. Karsten, “Stimuli-responsive mixed grafted polymer films with gradually changing properties,” Langmuir 21, 8711–8716 (2005).
[Crossref]

2004 (1)

K. S. Iyer and I. Luzinov, “Effect of macromolecular anchoring layer thickness and molecular weight on polymer grafting,” Macromolecules 37, 9538–9545 (2004).
[Crossref]

2003 (1)

2002 (1)

J.-J. Max and C. Chapados, “Isotope effects in liquid water by infrared spectroscopy,” J. Chem. Phys. 116, 4626–4642 (2002).
[Crossref]

2000 (1)

1986 (1)

J. J. Gil and E. Bernabeu, “Depolarization and polarization indices of an optical system,” Opt. Acta 33, 185–189 (1986).
[Crossref]

1982 (1)

1981 (1)

Aas, L. M. S.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

An, I.

R. W. Collins, I. An, and C. Chen, “Rotating polarizer and analyzer ellipsometry,” in Handbook of Ellipsometry, H. G. Tompkins and E. A. Irene, eds. (William Andrew, 2005).

Andersson, A.

Armakavicius, N.

P. Kühne, N. Armakavicius, V. Stanishev, C. M. Herzinger, M. Schubert, and V. Darakchieva, “Advanced terahertz frequency-domain ellipsometry instrumentation for in situ and ex situ applications,” IEEE Trans. Terahertz Sci. Technol. 8, 257–270 (2018).
[Crossref]

Arwin, A.

Arwin, H.

A. Mendoza-Galván, L. F. del Río, K. Järrendahl, and H. Arwin, “Graded pitch profile for the helicoidal broadband reflector and left-handed circularly polarizing cuticle of the scarab beetle Chrysina chrysargyrea,” Sci. Rep. 8, 6456 (2018).
[Crossref]

Aulich, D.

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

A. Furchner and D. Aulich, “Common polymers and proteins,” in Ellipsometry of Functional Organic Surfaces and Films, K. Hinrichs and K.-J. Eichhorn, eds. (Springer International Publishing, 2018), pp. 521–527.

A. Furchner and D. Aulich, “Organic materials for optoelectronic applications,” in Ellipsometry of Functional Organic Surfaces and Films, K. Hinrichs and K.-J. Eichhorn, eds. (Springer International Publishing, 2018), pp. 529–538.

Bernabeu, E.

J. J. Gil and E. Bernabeu, “Depolarization and polarization indices of an optical system,” Opt. Acta 33, 185–189 (1986).
[Crossref]

Bittrich, E.

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Borondics, F.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

Buatier de Mongeot, F.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

Carmagnola, F.

F. Carmagnola, J. M. Sanz, and J. M. Saiz, “Development of a Mueller matrix imaging system for detecting objects embedded in turbid media,” J. Quant. Spectrosc. Radiat. Transfer 146, 199–206 (2014).
[Crossref]

Chapados, C.

J.-J. Max and C. Chapados, “Isotope effects in liquid water by infrared spectroscopy,” J. Chem. Phys. 116, 4626–4642 (2002).
[Crossref]

Chen, C.

R. W. Collins, I. An, and C. Chen, “Rotating polarizer and analyzer ellipsometry,” in Handbook of Ellipsometry, H. G. Tompkins and E. A. Irene, eds. (William Andrew, 2005).

Chen, X.

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, “Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016).
[Crossref]

Chen, Z.

T. Mu, Z. Chen, C. Zhang, and R. Liang, “Optimal configurations of full-Stokes polarimeter with immunity to both Poisson and Gaussian noise,” J. Opt. 18, 055702 (2016).
[Crossref]

Chiappe, D.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

Chipman, R. A.

R. A. Chipman, “Polarimetry,” in Handbook of Optics, M. Bass, ed. (McGraw Hill, 1995).

Cigal, J.-C.

J.-C. Cigal, “A novel spectroscopic ellipsometer in the infrared,” Ph.D. thesis (Technische Universiteit Eindhoven, 2002).

Collins, R. W.

R. W. Collins, I. An, and C. Chen, “Rotating polarizer and analyzer ellipsometry,” in Handbook of Ellipsometry, H. G. Tompkins and E. A. Irene, eds. (William Andrew, 2005).

Darakchieva, V.

P. Kühne, N. Armakavicius, V. Stanishev, C. M. Herzinger, M. Schubert, and V. Darakchieva, “Advanced terahertz frequency-domain ellipsometry instrumentation for in situ and ex situ applications,” IEEE Trans. Terahertz Sci. Technol. 8, 257–270 (2018).
[Crossref]

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

De Martino, A.

E. Garcia-Caurel, R. Ossikovski, M. Foldyna, A. Pierangelo, B. Drévillon, and A. De Martino, “Advanced Mueller ellipsometry instrumentation and data analysis,” in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, eds. (Springer Berlin Heidelberg, 2013).

del Río, L. F.

A. Mendoza-Galván, L. F. del Río, K. Järrendahl, and H. Arwin, “Graded pitch profile for the helicoidal broadband reflector and left-handed circularly polarizing cuticle of the scarab beetle Chrysina chrysargyrea,” Sci. Rep. 8, 6456 (2018).
[Crossref]

Drévillon, B.

E. Garcia-Caurel, R. Ossikovski, M. Foldyna, A. Pierangelo, B. Drévillon, and A. De Martino, “Advanced Mueller ellipsometry instrumentation and data analysis,” in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, eds. (Springer Berlin Heidelberg, 2013).

Eichhorn, K.-J.

A. Furchner, A. Kroning, S. Rauch, P. Uhlmann, K.-J. Eichhorn, and K. Hinrichs, “Molecular interactions and hydration states of ultrathin functional films at the solid-liquid interface,” Anal. Chem. 89, 3240–3244 (2017).
[Crossref]

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

K. Hinrichs, M. Gensch, N. Nikonenko, J. Pionteck, and K.-J. Eichhorn, “Spectroscopic ellipsometry for characterization of thin films of polymer blends,” Macromol. Symp. 230, 26–32 (2005).
[Crossref]

L. Ionov, A. Sidorenko, K.-J. Eichhorn, M. Stamm, S. Minko, and H. Karsten, “Stimuli-responsive mixed grafted polymer films with gradually changing properties,” Langmuir 21, 8711–8716 (2005).
[Crossref]

K. Hinrichs and K.-J. Eichhorn, Ellipsometry of Functional Organic Surfaces and Films (Springer-Verlag Berlin Heidelberg, 2018).

Esser, N.

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

Foldyna, M.

E. Garcia-Caurel, R. Ossikovski, M. Foldyna, A. Pierangelo, B. Drévillon, and A. De Martino, “Advanced Mueller ellipsometry instrumentation and data analysis,” in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, eds. (Springer Berlin Heidelberg, 2013).

Fujiwara, H.

H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, 2007).

Furchner, A.

A. Furchner, A. Kroning, S. Rauch, P. Uhlmann, K.-J. Eichhorn, and K. Hinrichs, “Molecular interactions and hydration states of ultrathin functional films at the solid-liquid interface,” Anal. Chem. 89, 3240–3244 (2017).
[Crossref]

A. Furchner, C. Kratz, D. Gkogkou, H. Ketelsen, and K. Hinrichs, “Infrared-spectroscopic single-shot laser mapping ellipsometry: proof of concept for fast investigations of structured surfaces and interactions in organic thin films,” Appl. Surf. Sci. 421, 440–445 (2017).
[Crossref]

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

T. W. H. Oates, T. Shaykhutdinov, T. Wagner, A. Furchner, and K. Hinrichs, “Mid-infrared gyrotropy in split-ring resonators measured by Mueller matrix ellipsometry,” Opt. Mater. Express 4, 2646–2655 (2014).
[Crossref]

A. Furchner, “Structure and interactions of polymer thin films from infrared ellipsometry,” in Ellipsometry of Functional Organic Surfaces and Films, K. Hinrichs and K.-J. Eichhorn, eds. (Springer International Publishing, 2018), pp. 145–171.

A. Furchner and D. Aulich, “Common polymers and proteins,” in Ellipsometry of Functional Organic Surfaces and Films, K. Hinrichs and K.-J. Eichhorn, eds. (Springer International Publishing, 2018), pp. 521–527.

A. Furchner and D. Aulich, “Organic materials for optoelectronic applications,” in Ellipsometry of Functional Organic Surfaces and Films, K. Hinrichs and K.-J. Eichhorn, eds. (Springer International Publishing, 2018), pp. 529–538.

Garcia-Caurel, E.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

A. Arwin, A. Mendoza-Galván, R. Magnusson, A. Andersson, J. Landin, K. Järrendahl, E. Garcia-Caurel, and R. Ossikovski, “Structural circular birefringence and dichroism quantified by differential decomposition of spectroscopic transmission Mueller matrices from Cetonia aurata,” Opt. Lett. 41, 3293–3296 (2016).
[Crossref]

E. Garcia-Caurel, R. Ossikovski, M. Foldyna, A. Pierangelo, B. Drévillon, and A. De Martino, “Advanced Mueller ellipsometry instrumentation and data analysis,” in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, eds. (Springer Berlin Heidelberg, 2013).

Gaylord, T. K.

Gensch, M.

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

K. Hinrichs, M. Gensch, N. Nikonenko, J. Pionteck, and K.-J. Eichhorn, “Spectroscopic ellipsometry for characterization of thin films of polymer blends,” Macromol. Symp. 230, 26–32 (2005).
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Germer, T. A.

Gil, J. J.

J. J. Gil and E. Bernabeu, “Depolarization and polarization indices of an optical system,” Opt. Acta 33, 185–189 (1986).
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Giordano, M. C.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

Gkogkou, D.

A. Furchner, C. Kratz, D. Gkogkou, H. Ketelsen, and K. Hinrichs, “Infrared-spectroscopic single-shot laser mapping ellipsometry: proof of concept for fast investigations of structured surfaces and interactions in organic thin films,” Appl. Surf. Sci. 421, 440–445 (2017).
[Crossref]

Gu, H.

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, “Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016).
[Crossref]

Gu, Y.

K. Lin, Y. Gu, H. Zhang, Z. Qiang, B. D. Vogt, and N. S. Zacharia, “Accelerated amidization of branched poly(ethylenimine)/poly(acrylic acid) multilayer films by microwave heating,” Langmuir 32, 9118–9125 (2016).
[Crossref]

Herzinger, C. M.

P. Kühne, N. Armakavicius, V. Stanishev, C. M. Herzinger, M. Schubert, and V. Darakchieva, “Advanced terahertz frequency-domain ellipsometry instrumentation for in situ and ex situ applications,” IEEE Trans. Terahertz Sci. Technol. 8, 257–270 (2018).
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M. Schubert, H. Tino, and C. M. Herzinger, “Generalized far-infrared magneto-optic ellipsometry for semiconductor layer structures: determination of free-carrier effective-mass, mobility, and concentration parameters in n-type GaAs,” J. Opt. Soc. Am. A 20, 347–356 (2003).
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Hingerl, K.

M. Losurdo and K. Hingerl, Ellipsometry at the Nanoscale (Springer Berlin Heidelberg, 2013).

Hinrichs, K.

A. Furchner, A. Kroning, S. Rauch, P. Uhlmann, K.-J. Eichhorn, and K. Hinrichs, “Molecular interactions and hydration states of ultrathin functional films at the solid-liquid interface,” Anal. Chem. 89, 3240–3244 (2017).
[Crossref]

A. Furchner, C. Kratz, D. Gkogkou, H. Ketelsen, and K. Hinrichs, “Infrared-spectroscopic single-shot laser mapping ellipsometry: proof of concept for fast investigations of structured surfaces and interactions in organic thin films,” Appl. Surf. Sci. 421, 440–445 (2017).
[Crossref]

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

T. W. H. Oates, T. Shaykhutdinov, T. Wagner, A. Furchner, and K. Hinrichs, “Mid-infrared gyrotropy in split-ring resonators measured by Mueller matrix ellipsometry,” Opt. Mater. Express 4, 2646–2655 (2014).
[Crossref]

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

K. Hinrichs, M. Gensch, N. Nikonenko, J. Pionteck, and K.-J. Eichhorn, “Spectroscopic ellipsometry for characterization of thin films of polymer blends,” Macromol. Symp. 230, 26–32 (2005).
[Crossref]

K. Hinrichs and K.-J. Eichhorn, Ellipsometry of Functional Organic Surfaces and Films (Springer-Verlag Berlin Heidelberg, 2018).

Hofmann, T.

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

Hoy, O.

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Ionov, L.

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

L. Ionov, A. Sidorenko, K.-J. Eichhorn, M. Stamm, S. Minko, and H. Karsten, “Stimuli-responsive mixed grafted polymer films with gradually changing properties,” Langmuir 21, 8711–8716 (2005).
[Crossref]

Irene, E. A.

H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry (William Andrew, 2005).

Iyer, K. S.

K. S. Iyer and I. Luzinov, “Effect of macromolecular anchoring layer thickness and molecular weight on polymer grafting,” Macromolecules 37, 9538–9545 (2004).
[Crossref]

Janzén, E.

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

Järrendahl, K.

A. Mendoza-Galván, L. F. del Río, K. Järrendahl, and H. Arwin, “Graded pitch profile for the helicoidal broadband reflector and left-handed circularly polarizing cuticle of the scarab beetle Chrysina chrysargyrea,” Sci. Rep. 8, 6456 (2018).
[Crossref]

A. Arwin, A. Mendoza-Galván, R. Magnusson, A. Andersson, J. Landin, K. Järrendahl, E. Garcia-Caurel, and R. Ossikovski, “Structural circular birefringence and dichroism quantified by differential decomposition of spectroscopic transmission Mueller matrices from Cetonia aurata,” Opt. Lett. 41, 3293–3296 (2016).
[Crossref]

Jiang, H.

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, “Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016).
[Crossref]

Kakanakova-Georgieva, A.

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

Karsten, H.

L. Ionov, A. Sidorenko, K.-J. Eichhorn, M. Stamm, S. Minko, and H. Karsten, “Stimuli-responsive mixed grafted polymer films with gradually changing properties,” Langmuir 21, 8711–8716 (2005).
[Crossref]

Ketelsen, H.

A. Furchner, C. Kratz, D. Gkogkou, H. Ketelsen, and K. Hinrichs, “Infrared-spectroscopic single-shot laser mapping ellipsometry: proof of concept for fast investigations of structured surfaces and interactions in organic thin films,” Appl. Surf. Sci. 421, 440–445 (2017).
[Crossref]

Kilbey, S. M. I.

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

Kildemo, M.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

Kratz, C.

A. Furchner, C. Kratz, D. Gkogkou, H. Ketelsen, and K. Hinrichs, “Infrared-spectroscopic single-shot laser mapping ellipsometry: proof of concept for fast investigations of structured surfaces and interactions in organic thin films,” Appl. Surf. Sci. 421, 440–445 (2017).
[Crossref]

Kroning, A.

A. Furchner, A. Kroning, S. Rauch, P. Uhlmann, K.-J. Eichhorn, and K. Hinrichs, “Molecular interactions and hydration states of ultrathin functional films at the solid-liquid interface,” Anal. Chem. 89, 3240–3244 (2017).
[Crossref]

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

Kühne, P.

P. Kühne, N. Armakavicius, V. Stanishev, C. M. Herzinger, M. Schubert, and V. Darakchieva, “Advanced terahertz frequency-domain ellipsometry instrumentation for in situ and ex situ applications,” IEEE Trans. Terahertz Sci. Technol. 8, 257–270 (2018).
[Crossref]

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

Landin, J.

Layden, D.

Li, L.

Li, W.

W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, “Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016).
[Crossref]

Liang, R.

T. Mu, Z. Chen, C. Zhang, and R. Liang, “Optimal configurations of full-Stokes polarimeter with immunity to both Poisson and Gaussian noise,” J. Opt. 18, 055702 (2016).
[Crossref]

Lin, K.

K. Lin, Y. Gu, H. Zhang, Z. Qiang, B. D. Vogt, and N. S. Zacharia, “Accelerated amidization of branched poly(ethylenimine)/poly(acrylic acid) multilayer films by microwave heating,” Langmuir 32, 9118–9125 (2016).
[Crossref]

Liu, S.

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, “Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016).
[Crossref]

Lokitz, B. S.

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

Lorenz, K.

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

Losurdo, M.

M. Losurdo and K. Hingerl, Ellipsometry at the Nanoscale (Springer Berlin Heidelberg, 2013).

Lupitskyy, R.

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Luzinov, I.

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

K. S. Iyer and I. Luzinov, “Effect of macromolecular anchoring layer thickness and molecular weight on polymer grafting,” Macromolecules 37, 9538–9545 (2004).
[Crossref]

Magnusson, R.

Martella, C.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

Max, J.-J.

J.-J. Max and C. Chapados, “Isotope effects in liquid water by infrared spectroscopy,” J. Chem. Phys. 116, 4626–4642 (2002).
[Crossref]

Mendoza-Galván, A.

A. Mendoza-Galván, L. F. del Río, K. Järrendahl, and H. Arwin, “Graded pitch profile for the helicoidal broadband reflector and left-handed circularly polarizing cuticle of the scarab beetle Chrysina chrysargyrea,” Sci. Rep. 8, 6456 (2018).
[Crossref]

A. Arwin, A. Mendoza-Galván, R. Magnusson, A. Andersson, J. Landin, K. Järrendahl, E. Garcia-Caurel, and R. Ossikovski, “Structural circular birefringence and dichroism quantified by differential decomposition of spectroscopic transmission Mueller matrices from Cetonia aurata,” Opt. Lett. 41, 3293–3296 (2016).
[Crossref]

Mikhaylova, Y.

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

Minko, S.

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

L. Ionov, A. Sidorenko, K.-J. Eichhorn, M. Stamm, S. Minko, and H. Karsten, “Stimuli-responsive mixed grafted polymer films with gradually changing properties,” Langmuir 21, 8711–8716 (2005).
[Crossref]

Moharam, M. G.

Mu, T.

T. Mu, Z. Chen, C. Zhang, and R. Liang, “Optimal configurations of full-Stokes polarimeter with immunity to both Poisson and Gaussian noise,” J. Opt. 18, 055702 (2016).
[Crossref]

Müller, M.

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Nikonenko, N.

K. Hinrichs, M. Gensch, N. Nikonenko, J. Pionteck, and K.-J. Eichhorn, “Spectroscopic ellipsometry for characterization of thin films of polymer blends,” Macromol. Symp. 230, 26–32 (2005).
[Crossref]

Nilsson, D.

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

Oates, T. W. H.

Ossikovski, R.

A. Arwin, A. Mendoza-Galván, R. Magnusson, A. Andersson, J. Landin, K. Järrendahl, E. Garcia-Caurel, and R. Ossikovski, “Structural circular birefringence and dichroism quantified by differential decomposition of spectroscopic transmission Mueller matrices from Cetonia aurata,” Opt. Lett. 41, 3293–3296 (2016).
[Crossref]

E. Garcia-Caurel, R. Ossikovski, M. Foldyna, A. Pierangelo, B. Drévillon, and A. De Martino, “Advanced Mueller ellipsometry instrumentation and data analysis,” in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, eds. (Springer Berlin Heidelberg, 2013).

Peinado, A.

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

Pierangelo, A.

E. Garcia-Caurel, R. Ossikovski, M. Foldyna, A. Pierangelo, B. Drévillon, and A. De Martino, “Advanced Mueller ellipsometry instrumentation and data analysis,” in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, eds. (Springer Berlin Heidelberg, 2013).

Pionteck, J.

K. Hinrichs, M. Gensch, N. Nikonenko, J. Pionteck, and K.-J. Eichhorn, “Spectroscopic ellipsometry for characterization of thin films of polymer blends,” Macromol. Symp. 230, 26–32 (2005).
[Crossref]

Qiang, Z.

K. Lin, Y. Gu, H. Zhang, Z. Qiang, B. D. Vogt, and N. S. Zacharia, “Accelerated amidization of branched poly(ethylenimine)/poly(acrylic acid) multilayer films by microwave heating,” Langmuir 32, 9118–9125 (2016).
[Crossref]

Rappich, J.

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

Rauch, S.

A. Furchner, A. Kroning, S. Rauch, P. Uhlmann, K.-J. Eichhorn, and K. Hinrichs, “Molecular interactions and hydration states of ultrathin functional films at the solid-liquid interface,” Anal. Chem. 89, 3240–3244 (2017).
[Crossref]

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

Röseler, A.

A. Röseler, “Spectroscopic infrared ellipsometry,” in Handbook of Ellipsometry, H. G. Tompkins and E. A. Irene, eds. (William Andrew, 2005).

Saiz, J. M.

F. Carmagnola, J. M. Sanz, and J. M. Saiz, “Development of a Mueller matrix imaging system for detecting objects embedded in turbid media,” J. Quant. Spectrosc. Radiat. Transfer 146, 199–206 (2014).
[Crossref]

Sanz, J. M.

F. Carmagnola, J. M. Sanz, and J. M. Saiz, “Development of a Mueller matrix imaging system for detecting objects embedded in turbid media,” J. Quant. Spectrosc. Radiat. Transfer 146, 199–206 (2014).
[Crossref]

Schöche, S.

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

Schubert, M.

P. Kühne, N. Armakavicius, V. Stanishev, C. M. Herzinger, M. Schubert, and V. Darakchieva, “Advanced terahertz frequency-domain ellipsometry instrumentation for in situ and ex situ applications,” IEEE Trans. Terahertz Sci. Technol. 8, 257–270 (2018).
[Crossref]

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

M. Schubert, H. Tino, and C. M. Herzinger, “Generalized far-infrared magneto-optic ellipsometry for semiconductor layer structures: determination of free-carrier effective-mass, mobility, and concentration parameters in n-type GaAs,” J. Opt. Soc. Am. A 20, 347–356 (2003).
[Crossref]

Seeber, M.

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

Shaykhutdinov, T.

Sheparovych, R.

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Sidorenko, A.

L. Ionov, A. Sidorenko, K.-J. Eichhorn, M. Stamm, S. Minko, and H. Karsten, “Stimuli-responsive mixed grafted polymer films with gradually changing properties,” Langmuir 21, 8711–8716 (2005).
[Crossref]

Song, B.

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

Stamm, M.

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

L. Ionov, A. Sidorenko, K.-J. Eichhorn, M. Stamm, S. Minko, and H. Karsten, “Stimuli-responsive mixed grafted polymer films with gradually changing properties,” Langmuir 21, 8711–8716 (2005).
[Crossref]

Stanishev, V.

P. Kühne, N. Armakavicius, V. Stanishev, C. M. Herzinger, M. Schubert, and V. Darakchieva, “Advanced terahertz frequency-domain ellipsometry instrumentation for in situ and ex situ applications,” IEEE Trans. Terahertz Sci. Technol. 8, 257–270 (2018).
[Crossref]

Tino, H.

Tompkins, H. G.

H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry (William Andrew, 2005).

Uhlmann, P.

A. Furchner, A. Kroning, S. Rauch, P. Uhlmann, K.-J. Eichhorn, and K. Hinrichs, “Molecular interactions and hydration states of ultrathin functional films at the solid-liquid interface,” Anal. Chem. 89, 3240–3244 (2017).
[Crossref]

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Vitkin, I. A.

Vogt, B. D.

K. Lin, Y. Gu, H. Zhang, Z. Qiang, B. D. Vogt, and N. S. Zacharia, “Accelerated amidization of branched poly(ethylenimine)/poly(acrylic acid) multilayer films by microwave heating,” Langmuir 32, 9118–9125 (2016).
[Crossref]

Wagner, T.

Wang, J.

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Wood, M. F. G.

Zacharia, N. S.

K. Lin, Y. Gu, H. Zhang, Z. Qiang, B. D. Vogt, and N. S. Zacharia, “Accelerated amidization of branched poly(ethylenimine)/poly(acrylic acid) multilayer films by microwave heating,” Langmuir 32, 9118–9125 (2016).
[Crossref]

Zdyrko, B.

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Zhang, C.

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, “Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016).
[Crossref]

T. Mu, Z. Chen, C. Zhang, and R. Liang, “Optimal configurations of full-Stokes polarimeter with immunity to both Poisson and Gaussian noise,” J. Opt. 18, 055702 (2016).
[Crossref]

Zhang, H.

K. Lin, Y. Gu, H. Zhang, Z. Qiang, B. D. Vogt, and N. S. Zacharia, “Accelerated amidization of branched poly(ethylenimine)/poly(acrylic acid) multilayer films by microwave heating,” Langmuir 32, 9118–9125 (2016).
[Crossref]

Zhu, S.

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

ACS Appl. Mater. Interfaces (1)

A. Kroning, A. Furchner, D. Aulich, E. Bittrich, S. Rauch, P. Uhlmann, K.-J. Eichhorn, M. Seeber, I. Luzinov, S. M. I. Kilbey, B. S. Lokitz, S. Minko, and K. Hinrichs, “In situ infrared ellipsometry for protein adsorption studies on ultrathin smart polymer brushes in aqueous environment,” ACS Appl. Mater. Interfaces 7, 12430–12439 (2015).
[Crossref]

Adv. Funct. Mater. (1)

O. Hoy, B. Zdyrko, R. Lupitskyy, R. Sheparovych, D. Aulich, J. Wang, E. Bittrich, K.-J. Eichhorn, P. Uhlmann, K. Hinrichs, M. Müller, M. Stamm, S. Minko, and I. Luzinov, “Synthetic hydrophilic materials with tunable strength and a range of hydrophobic interactions,” Adv. Funct. Mater. 20, 2240–2247 (2010).
[Crossref]

Anal. Chem. (2)

A. Furchner, A. Kroning, S. Rauch, P. Uhlmann, K.-J. Eichhorn, and K. Hinrichs, “Molecular interactions and hydration states of ultrathin functional films at the solid-liquid interface,” Anal. Chem. 89, 3240–3244 (2017).
[Crossref]

Y. Mikhaylova, L. Ionov, J. Rappich, M. Gensch, N. Esser, S. Minko, K.-J. Eichhorn, M. Stamm, and K. Hinrichs, “In situ infrared ellipsometric study of stimuli-responsive mixed polyelectrolyte brushes,” Anal. Chem. 79, 7676–7682 (2007).
[Crossref]

Appl. Opt. (1)

Appl. Surf. Sci. (3)

B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, “Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry,” Appl. Surf. Sci. 439, 1079–1087 (2018).
[Crossref]

A. Peinado, M. Kildemo, L. M. S. Aas, C. Martella, M. C. Giordano, D. Chiappe, F. Buatier de Mongeot, F. Borondics, and E. Garcia-Caurel, “IR-Mueller matrix ellipsometry of self-assembled nanopatterned gold grid polarizer,” Appl. Surf. Sci. 421, 728–737 (2017).
[Crossref]

A. Furchner, C. Kratz, D. Gkogkou, H. Ketelsen, and K. Hinrichs, “Infrared-spectroscopic single-shot laser mapping ellipsometry: proof of concept for fast investigations of structured surfaces and interactions in organic thin films,” Appl. Surf. Sci. 421, 440–445 (2017).
[Crossref]

IEEE Trans. Terahertz Sci. Technol. (1)

P. Kühne, N. Armakavicius, V. Stanishev, C. M. Herzinger, M. Schubert, and V. Darakchieva, “Advanced terahertz frequency-domain ellipsometry instrumentation for in situ and ex situ applications,” IEEE Trans. Terahertz Sci. Technol. 8, 257–270 (2018).
[Crossref]

J. Appl. Phys. (1)

S. Schöche, T. Hofmann, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, P. Kühne, K. Lorenz, M. Schubert, and V. Darakchieva, “Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect,” J. Appl. Phys. 121, 205701 (2017).
[Crossref]

J. Chem. Phys. (1)

J.-J. Max and C. Chapados, “Isotope effects in liquid water by infrared spectroscopy,” J. Chem. Phys. 116, 4626–4642 (2002).
[Crossref]

J. Opt. (1)

T. Mu, Z. Chen, C. Zhang, and R. Liang, “Optimal configurations of full-Stokes polarimeter with immunity to both Poisson and Gaussian noise,” J. Opt. 18, 055702 (2016).
[Crossref]

J. Opt. Soc. Am. (2)

J. Opt. Soc. Am. A (2)

J. Quant. Spectrosc. Radiat. Transfer (1)

F. Carmagnola, J. M. Sanz, and J. M. Saiz, “Development of a Mueller matrix imaging system for detecting objects embedded in turbid media,” J. Quant. Spectrosc. Radiat. Transfer 146, 199–206 (2014).
[Crossref]

J. Vac. Sci. Technol. B (1)

W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, “Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016).
[Crossref]

Langmuir (2)

L. Ionov, A. Sidorenko, K.-J. Eichhorn, M. Stamm, S. Minko, and H. Karsten, “Stimuli-responsive mixed grafted polymer films with gradually changing properties,” Langmuir 21, 8711–8716 (2005).
[Crossref]

K. Lin, Y. Gu, H. Zhang, Z. Qiang, B. D. Vogt, and N. S. Zacharia, “Accelerated amidization of branched poly(ethylenimine)/poly(acrylic acid) multilayer films by microwave heating,” Langmuir 32, 9118–9125 (2016).
[Crossref]

Macromol. Symp. (1)

K. Hinrichs, M. Gensch, N. Nikonenko, J. Pionteck, and K.-J. Eichhorn, “Spectroscopic ellipsometry for characterization of thin films of polymer blends,” Macromol. Symp. 230, 26–32 (2005).
[Crossref]

Macromolecules (1)

K. S. Iyer and I. Luzinov, “Effect of macromolecular anchoring layer thickness and molecular weight on polymer grafting,” Macromolecules 37, 9538–9545 (2004).
[Crossref]

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J. J. Gil and E. Bernabeu, “Depolarization and polarization indices of an optical system,” Opt. Acta 33, 185–189 (1986).
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Opt. Express (1)

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Sci. Rep. (1)

A. Mendoza-Galván, L. F. del Río, K. Järrendahl, and H. Arwin, “Graded pitch profile for the helicoidal broadband reflector and left-handed circularly polarizing cuticle of the scarab beetle Chrysina chrysargyrea,” Sci. Rep. 8, 6456 (2018).
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J.-C. Cigal, “A novel spectroscopic ellipsometer in the infrared,” Ph.D. thesis (Technische Universiteit Eindhoven, 2002).

J. M. Chalmers and P. R. Griffiths, eds., Handbook of Vibrational Spectroscopy (Wiley, 2006).

R. W. Collins, I. An, and C. Chen, “Rotating polarizer and analyzer ellipsometry,” in Handbook of Ellipsometry, H. G. Tompkins and E. A. Irene, eds. (William Andrew, 2005).

A. Röseler, “Spectroscopic infrared ellipsometry,” in Handbook of Ellipsometry, H. G. Tompkins and E. A. Irene, eds. (William Andrew, 2005).

A. Furchner, “Structure and interactions of polymer thin films from infrared ellipsometry,” in Ellipsometry of Functional Organic Surfaces and Films, K. Hinrichs and K.-J. Eichhorn, eds. (Springer International Publishing, 2018), pp. 145–171.

E. Garcia-Caurel, R. Ossikovski, M. Foldyna, A. Pierangelo, B. Drévillon, and A. De Martino, “Advanced Mueller ellipsometry instrumentation and data analysis,” in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, eds. (Springer Berlin Heidelberg, 2013).

H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry (William Andrew, 2005).

H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, 2007).

M. Losurdo and K. Hingerl, Ellipsometry at the Nanoscale (Springer Berlin Heidelberg, 2013).

K. Hinrichs and K.-J. Eichhorn, Ellipsometry of Functional Organic Surfaces and Films (Springer-Verlag Berlin Heidelberg, 2018).

A. Furchner and D. Aulich, “Common polymers and proteins,” in Ellipsometry of Functional Organic Surfaces and Films, K. Hinrichs and K.-J. Eichhorn, eds. (Springer International Publishing, 2018), pp. 521–527.

A. Furchner and D. Aulich, “Organic materials for optoelectronic applications,” in Ellipsometry of Functional Organic Surfaces and Films, K. Hinrichs and K.-J. Eichhorn, eds. (Springer International Publishing, 2018), pp. 529–538.

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Figures (10)

Fig. 1.
Fig. 1. Schematic of the IR Mueller-matrix ellipsometer operating in reflection mode (top) with autocollimator (AC) and adjustable sample stage, or in transmission mode (bottom) with rotatable sample mount.
Fig. 2.
Fig. 2. Quadruples of MM elements obtaintable via different combinations of polarizer/analyzer/retarder settings.
Fig. 3.
Fig. 3. Left: intensity-normalized Stokes-vector components of the FT-IR source, as measured in front of the first polarizer. Right: diattenuation of single and tandem wire-grid polarizers.
Fig. 4.
Fig. 4. RMS noise (top) between 4000    cm 1 and 1000    cm 1 of selected MM elements (bottom) of dry air at two different spectral resolutions. The insets show examplary intensity spectra measured in an unpurged (humid) and purged (dry) ellipsometer chamber.
Fig. 5.
Fig. 5. Structure parameters of trapezoidal SiO 2 gratings on Si.
Fig. 6.
Fig. 6. Measured azimuth-dependent MM data ( ϕ 0 = 50 ° ) of a trapezoidal SiO 2 grating on Si compared to fitted data according to the optical model in Fig. 5. The fourth column shows several symmetries of the Mueller matrix. Measured spectra were smoothed at the high-wavenumber end because of noise due to the grating’s low reflectivity ( < 0.2 ). Gray and colored lines are raw and smoothed data, respectively. The legend lists nominal azimuths (0.5° offset).
Fig. 7.
Fig. 7. Time-resolved (47 s) transmission MM difference spectra measured between tensioned and relaxed states of a stretched low-density polyethylene (LDPE) foil. The schematic (bottom-right) shows the measurement geometry of the foil stretched across the sample stage.
Fig. 8.
Fig. 8. Thin PGMA films (118 nm, 68 nm, and 7.7 nm) on Si substrates studied in reflection at the solid–air interface.
Fig. 9.
Fig. 9. Measured (colored) and fitted (black) MM spectra of thin, isotropic PGMA films of various thicknesses.
Fig. 10.
Fig. 10. Left: liquid flow cell with thin polymer film on Si wedge measured in backside reflection. Right: measured and fitted in situ ellipsometric data of a 68 nm thick, isotropic PGMA film at the polymer–air and polymer–water interface.

Tables (1)

Tables Icon

Table 1. Nominal and Fitted Profile Parameters of the Measured SiO 2 Grating: Height (H), Periods ( P x , y ), Base, and Top Lengths ( B x , y , T x , y ) a

Equations (20)

Equations on this page are rendered with MathJax. Learn more.

S out = PSA T · M · PSG = D · A · R 2 · [ M 11 M 12 M 13 M 14 M 21 M 22 M 23 M 24 M 31 M 32 M 33 M 34 M 41 M 42 M 43 M 44 ] · R 1 · P · S in ,
M 11 = [ X 1 / ( 1 + c ) 2 s i / s 0 X 2 / ( 1 c 2 ) ] / [ 1 s i 2 / s 0 2 ] / X ˜ , M 1 b = [ X 2 / ( 1 c 2 ) s i / s 0 X 1 / ( 1 + c ) 2 ] / [ 1 s i 2 / s 0 2 ] / X ˜ , M a 1 = [ X 3 / ( 1 c 2 ) s i / s 0 X 4 / ( 1 c ) 2 ] / [ 1 s i 2 / s 0 2 ] / X ˜ , M a b = [ X 4 / ( 1 c ) 2 s i / s 0 X 3 / ( 1 c 2 ) ] / [ 1 s i 2 / s 0 2 ] / X ˜ ,
X 1 ( P , A ) = I P , A + I P , A + 90 ° + I P + 90 ° , A + I P + 90 ° , A + 90 ° , X 2 ( P , A ) = I P , A + I P , A + 90 ° I P + 90 ° , A I P + 90 ° , A + 90 ° , X 3 ( P , A ) = I P , A I P , A + 90 ° + I P + 90 ° , A I P + 90 ° , A + 90 ° , X 4 ( P , A ) = I P , A I P , A + 90 ° I P + 90 ° , A + I P + 90 ° , A + 90 ° ,
i = 1 for P = 0 ° , i = 2 for    P = 45 ° .
a = 2 & b = 2 for    P = 0 ° , A = 0 ° , a = 3 & b = 3 for    P = 45 ° , A = 45 ° , a = 2 & b = 3 for    P = 45 ° , A = 0 ° , a = 3 & b = 2 for    P = 0 ° , A = 45 ° .
M i 4 = [ M · R 1 ] i 3 / R 1 , 43 , i = 1 , 2 , 3 ,
M 4 j = [ R 2 · M ] 3 j / R 2 , 34 , j = 1 , 2 , 3 ,
M 44 = [ R 2 · M · R 1 ] 33 / ( R 1 , 43 R 2 , 34 ) ,
D = 1 c 1 + c = X ˜ 4 ( 0 ° , 0 ° ) X ˜ 1 ( 0 ° , 0 ° ) = X ˜ 4 ( 45 ° , 45 ° ) X ˜ 1 ( 45 ° , 45 ° ) , s 1 s 0 = 1 D · X ˜ 2 ( 0 ° , 0 ° ) X ˜ 1 ( 0 ° , 0 ° ) , s 2 s 0 = 1 D · X ˜ 2 ( 45 ° , 45 ° ) X ˜ 1 ( 45 ° , 45 ° ) .
D 12 = s 1 / s 0 + ( 1 + c ) 2 · X ˜ 3 ( 0 ° , 0 ° ) X ˜ 1 ( 0 ° , 0 ° ) ,
D 13 = s 2 / s 0 + ( 1 + c ) 2 · X ˜ 3 ( 45 ° , 45 ° ) X ˜ 1 ( 45 ° , 45 ° ) ,
P = i , j M i j 2 M 11 2 3 M 11 2 , P ph = M 33 2 + M 43 2 1 M 12 2 / M 22 2 .
M i 4 = [ M · R 1 ] i 3 M i 3 R 1 , 33 R 1 , 43 , i = 1 , 2 , 3 ,
M 4 j = [ R 2 · M ] 3 j M 3 j R 2 , 33 R 2 , 34 , j = 1 , 2 , 3 ,
M 44 = [ R 2 · M · R 1 ] 33 M 33 R 1 , 33 R 2 , 33 R 1 , 43 R 2 , 34 M 43 R 1 , 33 R 1 , 43 M 34 R 2 , 33 R 2 , 34 .
M i 4 M 11 = [ M · R 1 ] i 3 [ M · R 1 ] 11 · ( 1 + M 12 M 11 R 1 , 21 R 1 , 11 ) M i 3 M 11 R 1 , 33 R 1 , 11 R 1 , 43 R 1 , 11 , i = 1 , 2 , 3 .
M 4 j M 11 = [ R 2 · M ] 3 j [ R 2 · M ] 11 · ( 1 + M 21 M 11 R 2 , 12 R 2 , 11 ) M 3 j M 11 R 2 , 33 R 2 , 11 R 2 , 34 R 2 , 11 , j = 1 , 2 , 3 .
M 44 M 11 = [ R 2 · M · R 1 ] 33 [ R 2 · M · R 1 ] 11 · Z M 33 M 11 R 1 , 33 R 1 , 11 R 2 , 33 R 2 , 11 R 1 , 43 R 1 , 11 R 2 , 34 R 2 , 11 M 43 M 11 R 1 , 33 R 1 , 43 M 34 M 11 R 2 , 33 R 2 , 34
Z = 1 + M 12 M 11 R 1 , 21 R 1 , 11 + M 21 M 11 R 2 , 12 R 2 , 11 + M 22 M 11 R 1 , 21 R 1 , 11 R 2 , 12 R 2 , 11 .
M 11 = X 1 / X ˜ 1 , M 1 b = X 2 / X ˜ 1 / D , M a 1 = X 3 / X ˜ 1 / D , M a b = X 4 / X ˜ 1 / D 2 .