Abstract

We report better spectral uniformity in Si-wire-based multistage delayed Mach–Zehnder interferometer (DMZI) type optical multiplexers/demultiplexers (MUX/DeMUX). Based on a 300 mm silicon-on-insulator wafer-scale ArF-immersion lithography process that guarantees higher phase controllability for low insertion loss, spectral flatness, and low crosstalk, we were able to further improve spectral uniformity across the wafer by optimizing the waveguide width within the optical path of each DMZI region. Irrespective of channel spacing in the wavelength domain, it was experimentally demonstrated that the filter spectral center wavelength deviation of the proposed DeMUXs was three times smaller than that of conventional ones. The proposed device scheme would also be attractive for arbitrary channel spacing and channel count, which makes the proposed scheme more practical in high-performance wavelength division multiplexing optical transceivers.

© 2018 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Si-nanowire-based multistage delayed Mach–Zehnder interferometer optical MUX/DeMUX fabricated by an ArF-immersion lithography process on a 300  mm SOI wafer

Seok-Hwan Jeong, Daisuke Shimura, Takasi Simoyama, Tsuyoshi Horikawa, Yu Tanaka, and Ken Morito
Opt. Lett. 39(13) 3702-3705 (2014)

Low-loss, flat-topped and spectrally uniform silicon-nanowire-based 5th-order CROW fabricated by ArF-immersion lithography process on a 300-mm SOI wafer

Seok-Hwan Jeong, Daisuke Shimura, Takasi Simoyama, Miyoshi Seki, Nobuyuki Yokoyama, Minoru Ohtsuka, Keiji Koshino, Tsuyoshi Horikawa, Yu Tanaka, and Ken Morito
Opt. Express 21(25) 30163-30174 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription