Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer

Not Accessible

Your library or personal account may give you access

Abstract

A focusing lens consisting of two or more elements is widely used in ellipsometers for spatial resolution. In a typical ellipsometer layout, a lens is placed before the sample to focus light emerging to the sample, and another after the sample to collect the scattered light from the sample. Accurately calibrating the artifacts of the focusing lens is of great importance. In this paper, a method to improve calibration accuracy is proposed. A general analytical model is deduced to describe the artifacts of the focusing lens. This model can be applied to a system model of a dual rotating-compensator Mueller matrix ellipsometer. By adding a uniaxial crystal to calibration samples, with its optical axis neither parallel nor perpendicular to the incident plane, we can better separate artifacts from the lens before and after the sample. The system model also includes depolarization effects due to a finite numerical aperture (NA) that is related to the focusing lens. Similar effects due to the finite spectral bandwidth are also considered. Our simulation’s results have validated the proposed method.

© 2018 Optical Society of America

Full Article  |  PDF Article
More Like This
Systematic errors for a Mueller matrix dual rotating compensator ellipsometer

Laurent Broch, Aotmane En Naciri, and Luc Johann
Opt. Express 16(12) 8814-8824 (2008)

Mueller matrix ellipsometer based on discrete-angle rotating Fresnel rhomb compensators

Subiao Bian, Changcai Cui, and Oriol Arteaga
Appl. Opt. 60(16) 4964-4971 (2021)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (62)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved