Abstract

In this paper, we enhance the steepness of film thickness edge in terahertz off-axis digital holography by employing a reconstruction method based on a direct Fourier and Hermite polynomial function. The method is applied to samples of 110 μm and 80 μm step heights to extract the phase images in real time. Use of this method reduces the resolution factor by around one half, representing around a 50% decrease in critical dimension as compared with conventional measurements. The method is very promising and opens the route to potential applications in the fields of microlithography.

© 2018 Optical Society of America

Iterative phase-retrieval-assisted off-axis terahertz digital holography

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Appl. Opt. 58(33) 9208-9216 (2019)

ADMM-inspired image reconstruction for terahertz off-axis digital holography

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J. Opt. Soc. Am. A 41(3) A1-A14 (2024)

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Spatially incoherent common-path off-axis color digital holography

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Single-shot dual-wavelength phase reconstruction in off-axis digital holography with polarization-multiplexing transmission

Zhe Wang, Zhuqing Jiang, and Yifei Chen
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