Abstract

This article introduces a simple metrology set-up based on white light interference. The aim is to determine the thickness of thin transparent films by their reflection color under white illumination. Therefore, one digital color image of a large field of view is taken in nontelecentric geometry. To obtain reflected light at all angles of view without having to move the camera the substrate has to be sufficiently rough. Additionally, interference occurs at the thin transparent film covering the substrate surface from which a two-dimensional lateral thickness distribution can be calculated. This method has been used as industrial inline process control for a CdS semiconductor layer on top of a rough Cu(In,Ga)(Se,S)2 thin film solar absorber and yielded 74 nm film thickness with only a 1 nm standard deviation. Options to further reduce the standard deviation with different illuminants and other cameras are proposed.

© 2017 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry

Seung-Woo Kim and Gee-Hong Kim
Appl. Opt. 38(28) 5968-5973 (1999)

Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure

Young-Sik Ghim and Seung-Woo Kim
Appl. Opt. 48(4) 799-803 (2009)

Critical dimension measurement of transparent film layers by multispectral imaging

Soonyang Kwon, Namyoon Kim, Taeyong Jo, and Heui Jae Pahk
Opt. Express 22(14) 17370-17381 (2014)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription