Abstract

We have mathematically explicated and experimentally demonstrated how a correlation and convolution filter can dramatically suppress the noise that coexists with the scanned topographic signals of two-dimensional (2D) gratings and lattices with 2D perspectives. To realize pitch evaluation, the true peaks’ coordinates have been precisely acquired after detecting the local maxima from the filtered signal, followed by image processing. The combination of 2D filtering, local-maxima detecting, and image processing make up the pitch detection (PD) method. It is elucidated that the pitch average, uniformity, rotation angle, and orthogonal angle can be calculated using the PD method. This has been applied to the pitch evaluation of several 2D gratings and lattices, and the results are compared with the results of using the center-of-gravity (CG) and Fourier-transform-based (FT) method. The differences of pitch averages which are produced using the PD, CG, and FT methods are within 1.5 pixels. Moreover, the PD method has also been applied to detect the dense peaks of Si (111) 7×7 surface and the highly oriented pyrolytic graphite (HOPG) basal plane.

© 2017 Optical Society of America

Full Article  |  PDF Article
More Like This
Alignment-free characterization of 2D gratings

Morten Hannibal Madsen, Pierre Boher, Poul-Erik Hansen, and Jan Friis Jørgensen
Appl. Opt. 55(2) 317-322 (2016)

Through-focus technique for nano-scale grating pitch and linewidth analysis

Yi-Sha Ku, An-Shun Liu, and Nigel Smith
Opt. Express 13(18) 6699-6708 (2005)

Full-color digitized holography for large-scale holographic 3D imaging of physical and nonphysical objects

Kyoji Matsushima and Noriaki Sonobe
Appl. Opt. 57(1) A150-A156 (2018)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (32)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription