Investigation of SiO2-Al2O3 nanolaminates for protection of silver reflectors

S. Schwinde; M. Schürmann; N. Kaiser; A. Tünnermann

doi:10.1364/AO.56.000C41

Applied Optics
Vol. 56,
Issue 4,
pp. C41-C46
(2017)
•https://doi.org/10.1364/AO.56.000C41

Investigation of SiO₂-Al₂O₃ nanolaminates for protection of silver reflectors

S. Schwinde, M. Schürmann, N. Kaiser, and A. Tünnermann

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S. Schwinde, M. Schürmann, N. Kaiser, and A. Tünnermann, "Investigation of SiO₂-Al₂O₃ nanolaminates for protection of silver reflectors," Appl. Opt. 56, C41-C46 (2017)

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Abstract

$H_{2} S$ and particles from the atmosphere can damage silver reflectors. These defects lead to scattering and a reduction of reflectivity. With regard to these risks, the suitability of sputtered ${SiO}_{2}$ , ${Al}_{2} O_{3}$ , and ${SiO}_{2} - {Al}_{2} O_{3}$ nanolaminates for the protection of Ag was analyzed. The optical properties, protection properties against $H_{2} S$ , solubility, film stress, and protection properties against particle-induced defect formation have been investigated. Especially in the case of particle-induced defects on protected Ag, differences between the protective coatings are considerable, and the nanolaminate layers have advantageous properties.

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	${Al}_{2} O_{3}$ -Coatings			${SiO}_{2}$ -Coatings			Laminate-Coatings
	${Al}_{2} O_{3}$	${Al}_{2} O_{3}$	${Al}_{2} O_{3}$	${SiO}_{2}$	${SiO}_{2}$	${SiO}_{2}$	5*( ${SiO}_{2} / {Al}_{2} O_{3}$ )	10*( ${SiO}_{2} / {Al}_{2} O_{3}$ )	40*( ${SiO}_{2} / {Al}_{2} O_{3}$ )
Film deposition
Ar-flow in sccm	35	90	160	35	90	160	35/160	35/160	35/160
Optical Performance (refractive index)
$n$ at 700 nm			1.66	1.47			1.56	1.56	1.56
Solubility
$t_{1 / 2}$ in ${Na}_{2} S$ -Solution/h	$< 5$	$< 5$	$< 5$	$> 100$	$\sim 30$	$\sim 20$	$> 100$	$> 100$	$> 100$
$t_{1 / 2}$ in NaCl-Solution/h	$> 100$	$> 100$	$> 100$	$> 100$	$\sim 90$	$\sim 10$	$> 100$	$> 100$	$> 100$
Film stress
Stress/MPa	−220	−190	−80	−380	−280	−150	−45	−50	−40

	$Ag + {Al}_{2} O_{3}$ - Coatings	$Ag + {SiO}_{2}$ - Coatings	$Ag +$ Laminate- Coatings
${Na}_{2} S \cdot {xH}_{2} O$ conta-mination and exposure to 60% RH at 30°C	Defects after 3 h	No defects	No defects
NaCl contamination and exposure to 85% RH at 45°C	Some defects after 20 h	Defects after 1 h (less at less Ar-flow)	Some defects after 20 h

	${Al}_{2} O_{3}$ -Coatings			${SiO}_{2}$ -Coatings			Laminate-Coatings
	${Al}_{2} O_{3}$	${Al}_{2} O_{3}$	${Al}_{2} O_{3}$	${SiO}_{2}$	${SiO}_{2}$	${SiO}_{2}$	5*( ${SiO}_{2} / {Al}_{2} O_{3}$ )	10*( ${SiO}_{2} / {Al}_{2} O_{3}$ )	40*( ${SiO}_{2} / {Al}_{2} O_{3}$ )
Film deposition
Ar-flow in sccm	35	90	160	35	90	160	35/160	35/160	35/160
Optical Performance (refractive index)
$n$ at 700 nm			1.66	1.47			1.56	1.56	1.56
Solubility
$t_{1 / 2}$ in ${Na}_{2} S$ -Solution/h	$< 5$	$< 5$	$< 5$	$> 100$	$\sim 30$	$\sim 20$	$> 100$	$> 100$	$> 100$
$t_{1 / 2}$ in NaCl-Solution/h	$> 100$	$> 100$	$> 100$	$> 100$	$\sim 90$	$\sim 10$	$> 100$	$> 100$	$> 100$
Film stress
Stress/MPa	−220	−190	−80	−380	−280	−150	−45	−50	−40

	$Ag + {Al}_{2} O_{3}$ - Coatings	$Ag + {SiO}_{2}$ - Coatings	$Ag +$ Laminate- Coatings
${Na}_{2} S \cdot {xH}_{2} O$ conta-mination and exposure to 60% RH at 30°C	Defects after 3 h	No defects	No defects
NaCl contamination and exposure to 85% RH at 45°C	Some defects after 20 h	Defects after 1 h (less at less Ar-flow)	Some defects after 20 h

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Applied Optics