Abstract

A monolithic thin-film buckling process was used to fabricate arrays of high-finesse (2×103) curved-mirror Fabry–Perot cavities on a silicon chip, with areal density 104 per square centimeter. The cavity shape matches the predictions of elastic buckling theory, with maximum curvature at the center where the fundamental mode resides. We describe cavities with mode volume <1.5λ3 for the fundamental spatial resonance. We also describe cavities connected to air-core channels. Preliminary light-coupling results suggest that these structures have potential to enable the side coupling of gases, liquids, and pump, probe, or trapping beams.

© 2017 Optical Society of America

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