Abstract

In order to improve measurement precision and facilitate the instrument installation of the equivalent wavelength self-mixing interferometer, an envelope extraction Fourier transform algorithm is presented for microscopic vibration measurement. Theoretically, the precision is about 21 nm without modulation, and the minimum measurable vibration amplitude is about 87 nm. The validity of the proposed method was demonstrated with simulated signals and then confirmed by several experimental measurements.

© 2017 Optical Society of America

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