Abstract

This paper presents an enhanced differential plane mirror interferometer with high resolution for measuring straightness. Two sets of space symmetrical beams are used to travel through the measurement and reference arms of the straightness interferometer, which contains three specific optical devices: a Koster prism, a wedge prism assembly, and a wedge mirror assembly. Changes in the optical path in the interferometer arms caused by straightness are differential and converted into phase shift through a particular interferometer system. The interferometric beams have a completely common path and space symmetrical measurement structure. The crosstalk of the Abbe error caused by pitch, yaw, and roll angle is avoided. The dead path error is minimized, which greatly enhances the stability and accuracy of the measurement. A measurement resolution of 17.5 nm is achieved. The experimental results fit well with the theoretical analysis.

© 2017 Optical Society of America

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