Abstract

We propose a defect detection system to identify phase defects on optics based on a lensless reflective point diffraction interferometer (LRPDI). The optics under test are illuminated by a collimated beam to produce a signal wavefront carrying the defect information, and then the signal wavefront is recorded in a high carrier interferogram using the LRPDI. By lensless imaging, amplitude and phase defects, as well as the accurate phase of a phase defect, can be identified. The simulation and experiment demonstrate the success of the proposed system in detecting phase defects, and its high-accuracy and high-resolution dynamic detection abilities are verified.

© 2017 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Lensless reflective point diffraction interferometer

Wenhua Zhu, Lei Chen, Donghui Zheng, Ying Yang, Zhigang Han, and Jinpeng Li
Appl. Opt. 55(19) 5158-5163 (2016)

Single-shot reflective shearing point diffraction interferometer for wavefront measurements

Wenhua Zhu, Lei Chen, Chenfeng Gu, Jun Wan, and Donghui Zheng
Appl. Opt. 54(20) 6155-6161 (2015)

Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability

Rongli Guo, Baoli Yao, Peng Gao, Junwei Min, Jun Han, Xun Yu, Ming Lei, Shaohui Yan, Yanlong Yang, Dan Dan, and Tong Ye
Appl. Opt. 52(15) 3484-3489 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Supplementary Material (8)

NameDescription
» Visualization 1       Propagation of the amplitude defect: interferogram.
» Visualization 2       Propagation of the amplitude defect: amplitude.
» Visualization 3       Propagation of the amplitude defect: phase.
» Visualization 4       Propagation of the phase defect: interferogram.
» Visualization 5       Propagation of the phase defect: amplitude.
» Visualization 6       Propagation of the phase defect: phase.
» Visualization 7       Phase variations of defect b.
» Visualization 8       Phase variations of defect c.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (10)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription