Abstract

To further study the microscopic mechanism and beam diameter effect during light depolarization (LDP), we developed a compact laser instrument (λ=632.8  nm) with an adjustable beam diameter of 18  μm (approximately 28λ). Six nickel plate samples with rms roughness, Rq, of 42 nm to 2.3 μm (i.e., 0.0673.7λ) fabricated by the fine-honing method are examined. To analyze the beam diameter effect as applying LDP for submicron and micron Rq evaluation, the cross-sectional beam-spot size (BSS) is adjusted from 20 μm to 650 μm during off-specular inspections. The results of BSS 40  μm (i.e., 60λ) have a 10-nm-level Rq sensitivity, while those of BSS 140  μm (220λ) have about a 100 times weaker sensitivity. It means that BSS of 60λ and 220λ should have instructional significance as applying LDP for precision levels of 10 nm and 1 μm surface roughness analyses, respectively. In addition, since the instrument is simple, portable, stable, and low-cost, it has great potential for both LDP analyses and practical online roughness testing.

© 2017 Optical Society of America

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Corrections

Linsheng Liu and Kazuhiro Nonaka, "Beam diameter thresholds as applying light depolarization for effective submicron and micron root-mean-square roughness evaluation: erratum," Appl. Opt. 57, 7081-7081 (2018)
https://www.osapublishing.org/ao/abstract.cfm?uri=ao-57-24-7081

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