Abstract

Polished diamond coated silicon carbide can be a potential candidate material for making optical mirrors, due to the excellent properties. At present, five typical types of diamond films are deposited on RB-SiC substrates by hot filament chemical vapor deposition, and then polished by mechanical polishing. It is found that the boron-doped micro-crystalline and undoped nano-crystalline composite diamond (BDMC-UNCCD) coated specimen performs the best before, during, and after polishing. The film surface composed of nano-sized diamond grains has relatively low surface roughness and hardness, which are beneficial for the efficient polishing, and under the present condition only such a surface can be completely polished to a homogeneous mirror surface. The micro-sized diamond grains and the boron incorporation in the underlying BDMCD layer can enhance the film–substrate adhesion, which plays an important role in the film integrity during the polishing or subsequent applications. In conclusion, the polished BDMC-UNCCD coated RB-SiC specimen indeed shows low surface roughness (Ra=5.41  nm), high hardness (71.47 GPa), high elastic modulus (746 GPa), favorable surface shape accuracy (RMS=0.083λ), and considerable reflectivity in the short-wavelength range.

© 2017 Optical Society of America

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