Abstract

A prototype of a profilometer was built with the technique of composite interferometry for measurement of the distribution of both the amplitude and phase information of the surface of a material simultaneously. The composite interferometer was composed of a Michelson interferometer for measuring the surface profile of the sample and a Mach–Zehnder interferometer for measuring the phase deviation caused by the scanning component and environmental perturbations. A high-sensitivity surface profile can be obtained by use of the phase compensation mechanism through subtraction of the phases of the interferograms detected in the two interferometers. With the new design and improvement of robustness of the optical system, the measurement speed and accuracy were significantly improved. Furthermore, an additional optical delay component results in a higher sensitivity of the interference signal. This prototype of vibration-immune profilometer was examined to have a displacement sensitivity of 0.64 nm.

© 2016 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Surface profilometry with composite interferometer

Cheng-Chung Lai and I-Jen Hsu
Opt. Express 15(21) 13949-13956 (2007)

High-sensitivity dynamical profilometry with a fiber-based composite interferometer

Chun-Wei Chang, Max T. Hou, and I-Jen Hsu
Opt. Lett. 38(14) 2434-2436 (2013)

Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure

Young-Sik Ghim and Seung-Woo Kim
Appl. Opt. 48(4) 799-803 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription