Abstract

A three-step phase stepping profilometry based on a fiber optic Lloyd’s mirror assembly is employed in the optical profilometry for the first time to measure the shapes of 3D objects. Required π/2 phase shifts for interference fringe pattern are obtained by mechanically sliding the Lloyd assembly via an ordinary micrometer stage. The experimental setup is simple and low cost to construct, and is insensitive to the ambient temperature fluctuations and environmental vibrations that cause unwanted effects on the projected fringe pattern. Consecutive interferograms are captured by a CCD camera and are processed with an algorithm to accomplish 3D topographies.

© 2016 Optical Society of America

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