Abstract
Liquid crystal on silicon (LCoS) devices usually show spatial phase nonuniformity (SPNU) in applications of phase modulation, which comprises the phase retardance nonuniformity (PRNU) as a function of the applied voltage and inherent wavefront distortion (WFD) introduced by the device itself. We propose a multipoint calibration method utilizing a Fizeau interferometer to compensate SPNU of the device. Calibration of PRNU is realized by defining a grid of cells onto the aperture and then calculating phase retardance of each cell versus a gradient gray pattern. With designing an adjusted gray pattern calculated by the calibrated multipoint phase retardance function, compensation of inherent WFD is achieved. The peak-to-valley (PV) value of the residual WFD compensated by the multipoint calibration method is significantly reduced from to , while the PV value of the residual WFD after global calibration is reduced to . Experimental results of the generated finite-energy 2D Airy beams in Fourier space demonstrate the effectiveness of this multipoint calibration method.
© 2016 Optical Society of America
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