Abstract

In phase-shifting interferometry, phase modulation nonlinearity causes both spatially uniform and nonuniform errors in the measured phase. Conventional linear-detuning error-compensating algorithms only eliminate the spatially variable error component. The uniform error is proportional to the inertial momentum of the data-sampling weight of a phase-shifting algorithm. This paper proposes a design approach to cancel the momentum by using characteristic polynomials in the Z-transform space and shows that an arbitrary M-frame algorithm can be modified to a new (M+2)-frame algorithm that acquires new symmetry to eliminate the uniform error.

© 2016 Optical Society of America

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General methods for generating phase-shifting interferometry algorithms

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Appl. Opt. 36(31) 8098-8115 (1997)

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