Optimization of Ta₂O₅ optical thin film deposited by radio frequency magnetron sputtering

${\mathsf{Ta}}_{\mathsf{2}}{\mathsf{O}}_{\mathsf{5}}$ Design of Experiments

Indices $\mathsf{n}$ and $\mathsf{k}$ Results Plus Thickness and Deposition Rates of DOE Test Runs^a

Indices $\mathsf{n}$ and $\mathsf{k}$ Results for the Confirmation Sample #16

Table 1.

${\mathsf{Ta}}_{\mathsf{2}}{\mathsf{O}}_{\mathsf{5}}$ Design of Experiments

Table 2.

Indices $\mathsf{n}$ and $\mathsf{k}$ Results Plus Thickness and Deposition Rates of DOE Test Runs^a

Table 3.

Indices $\mathsf{n}$ and $\mathsf{k}$ Results for the Confirmation Sample #16