Abstract
We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd’s mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is exhibits a continuous period variation of across 17 mm width.
© 2016 Optical Society of America
Full Article | PDF ArticleMore Like This
Ratish Rao Nagaraj Rao, Florian Bienert, Michael Moeller, Danish Bashir, Alina Hamri, Frederic Celle, Emilie Gamet, Marwan Abdou Ahmed, and Yves Jourlin
Opt. Express 31(1) 371-380 (2023)
Gaopeng Xue, Haiou Lu, Xinghui Li, Qian Zhou, Guanhao Wu, Xiaohao Wang, Qihang Zhai, and Kai Ni
Opt. Express 28(2) 2179-2191 (2020)
Abhijeet Bagal and Chih-Hao Chang
Opt. Lett. 38(14) 2531-2534 (2013)