Abstract

A method is proposed for calculating the optical emission spectrometer (OES) light-collection efficiency using the effective solid angle from an arbitrary point source. Based on the point source–OES relative positioning, the effective solid angle is derived for four cases: (1) on axis and on the object plane; (2) on axis and outside the object plane; (3) off axis and on the object plane; and (4) off axis and outside the object plane. The results were in good agreement with those obtained through Monte Carlo ray tracing. After calculating the OES geometrical collection efficiency with respect to the object plane distance in three different-sized cylindrical volume sources, we suggest a simple strategy to increase this efficiency in plasma process monitoring.

© 2016 Optical Society of America

Collection optics for a Raman spectrometer based on the 90° geometry of scattered light collection

Dmitry V. Petrov, Ivan I. Matrosov, and Danila O. Sedinkin
Appl. Opt. 55(29) 8293-8295 (2016)

Impacts of a collection system on laser-induced breakdown spectroscopy signal detection

Tianqi Li, Sahar Sheta, Zongyu Hou, Jian Dong, and Zhe Wang
Appl. Opt. 57(21) 6120-6127 (2018)

Analytical method for calculating internal stray radiation from an IR spectrometer based on the view factor

Zhi-Nan Zhang, Li-Bo Li, Bing-Liang Hu, Peng-Chong Wang, Ying Yang, Shan-Liang Ke, Shuang Wang, and Si-Yuan Li
Appl. Opt. 62(3) 725-734 (2023)

Ray tracing method in phase space for two-dimensional optical systems

C. Filosa, J. H. M. ten Thije Boonkkamp, and W. L. IJzerman
Appl. Opt. 55(13) 3599-3606 (2016)

Analytical estimation of solid angle subtended by complex well-resolved surfaces for infrared detection studies

Shripad P. Mahulikar, Santosh K. Potnuru, and Pankaj S. Kolhe
Appl. Opt. 46(22) 4991-4998 (2007)