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Visible-range hollow waveguides by guided buckling of Ta2O5/SiO2 multilayers

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Abstract

Hollow waveguides operating near 550 nm wavelength were fabricated by guided formation of delamination buckles within Ta2O5/SiO2 multilayers. The fabrication process employed a pair of sequentially deposited 10-period Bragg mirrors separated by a patterned, low-adhesion fluorocarbon layer. Propagation loss as low as a few dB/cm was measured, consistent with theoretical predictions.

© 2016 Optical Society of America

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