Abstract

We focus our efforts on development of an advanced monochromatic monitoring strategy to assist the optical coating engineer in finding a single wavelength or a sequence of monitoring wavelengths that meet simultaneously several practical demands, namely, specified input and output swing values, specified amplitude of a monitoring signal variation, and the distance between trigger point and the last signal extremum. Additionally, the most important demand is that the number of different monitoring wavelengths must be as small as possible. Manual construction of such a monitoring strategy is almost impossible because of a large number of conditions to be satisfied. We propose an algorithm that automatically generates a monitoring spreadsheet so that all demands can be satisfied as closely as possible. We consider six typical design problems and obtain a series of solutions for each of them. Then, we provide computational simulations of deposition processes assuming that they are controlled by monochromatic monitoring with the monitoring strategy generated by our algorithm, and we demonstrate how an optical coating engineer can select design solutions that exhibit the highest production yields.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Computational experiments on optical coating production using monochromatic monitoring strategy aimed at eliminating a cumulative effect of thickness errors

Alexander V. Tikhonravov, Michael K. Trubetskov, and Tatiana V. Amotchkina
Appl. Opt. 46(28) 6936-6944 (2007)

Statistical approach to choosing a strategy of monochromatic monitoring of optical coating production

A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina
Appl. Opt. 45(30) 7863-7870 (2006)

Advantages and challenges of optical coating production with indirect monochromatic monitoring

Jinlong Zhang, Chong Cao, Alexander V. Tikhonravov, Michael K. Trubetskov, Artur Gorokh, Xinbin Cheng, and Zhanshan Wang
Appl. Opt. 54(11) 3433-3439 (2015)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (9)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription