Abstract

The designs of 300 mm ruling engine producing gratings and echelles under interferometric control (CIOMP-2) are presented. A new ruling-tool carriage system and its driving mechanism—which are easy to manufacture—are proposed. A new blank carriage system, controlled by a dual-frequency laser interferometer and a piezoelectric actuator, is designed. The CIOMP-2 ruling engine can now rule grating blanks with dimensions up to $300\mathrm{mm}\times 300\mathrm{mm}$, and mainly rules gratings with grating constants between 10 and $2400\text{lines}/\mathrm{mm}$. The wavelength range of CIOMP-2 gratings is from ultraviolet to mid-infrared wavelengths. Experiments show that the new ruling-tool carriage system works well and stability of motion is improved with the help of a flexure-hinge structure, and the threefold standard deviation values of the blank carriage positioning errors are less than $\sim 5\mathrm{nm}$. For $600\mathrm{line}/\mathrm{mm}$ gratings (diffraction order $m=-1$), the scatter intensities and ghosts reach ${10}^{-5}$ of the maximum intensity. The scatter intensities and ghost of gratings ruled with CIOMP-2 are low, and no Rowland ghosts are visible. The gratings ruled by CIOMP-2 have high diffraction efficiency and resolving power. CIOMP-2 can also produce varied-line-space, bend-line, and aberration-reducing gratings and echelles.

© 2015 Optical Society of America

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