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A new nonaqueous and abrasive-free magnetorheological finishing (MRF) method is adopted for processing a KDP crystal. MRF polishing is easy to result in the embedding of carbonyl iron (CI) powders; meanwhile, Fe contamination on the KDP crystal surface will affect the laser induced damage threshold seriously. This paper puts forward an appropriate MRF polishing process to avoid the embedding. Polishing results show that the embedding of CI powders can be avoided by controlling the polishing parameters. Furthermore, on the KDP crystal surface, magnetorheological fluids residua inevitably exist after polishing and in which the Fe contamination cannot be removed completely by initial ultrasonic cleaning. To solve this problem, a kind of ion beam figuring (IBF) polishing is introduced to remove the impurity layer. Then the content of Fe element contamination and the depth of impurity elements are measured by time of flight secondary ion mass spectrometry. The measurement results show that there are no CI powders embedding in the MRF polished surface and no Fe contamination after the IBF polishing process, respectively. That verifies the feasibility of MRF polishing-IBF polishing (cleaning) for processing a KDP crystal.
© 2015 Optical Society of America
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