Abstract

We propose a novel measurement system based on a low coherence Michelson interferometer and six-axis hexapod platform to accurately measure structures with high aspect ratio using different tilt angles of the measured surface. In order to realize automatic measurement, the system is designed to automatically perform autofocusing, adjust the tilt angle of the test surface, make surface measurements, and merge the measurement data sets. Due to certain topography, e.g., structures with high aspect ratio, the interferometer cannot obtain enough reflected light to evaluate the height information in some areas of the test surface. For this reason, we developed a measurement system that uses measurements from different tilt angles of the test surface and stitching algorithms to realize a complete surface measurement data set. The performance of the proposed measurement system is evaluated experimentally and compared to the results of measurements using a perthometer.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

Kamil Liżewski, Sławomir Tomczewski, Tomasz Kozacki, and Julianna Kostencka
Appl. Opt. 53(11) 2446-2454 (2014)

Continuous measurement of optical surfaces using a line-scan interferometer with sinusoidal path length modulation

Holger Knell, Sören Laubach, Gerd Ehret, and Peter Lehmann
Opt. Express 22(24) 29787-29798 (2014)

Hexapod control for an active secondary mirror: general concept and test results

Claudio Pernechele, Favio Bortoletto, and Klaus Reif
Appl. Opt. 37(28) 6816-6821 (1998)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription