We report a simple method, based on intensity measurements, for the characterization of the wavefront and aberrations produced by micro-optical focusing elements. This method employs the setup presented earlier in [Opt. Express 22, 13202 (2014) [CrossRef] ] for measurements of the 3D point spread function, on which a basic phase-retrieval algorithm is applied. This combination allows for retrieval of the wavefront generated by the micro-optical element and, in addition, quantification of the optical aberrations through the wavefront decomposition with Zernike polynomials. The optical setup requires only an in-motion imaging system. The technique, adapted for the optimization of micro-optical component fabrication, is demonstrated by characterizing a planoconvex microlens.
© 2015 Optical Society of AmericaFull Article | PDF Article
OSA Recommended Articles
Maciej Baranski, Stephane Perrin, Nicolas Passilly, Luc Froehly, Jorge Albero, Sylwester Bargiel, and Christophe Gorecki
Opt. Express 22(11) 13202-13212 (2014)
J. A. Arriaga-Hernández, B. T. Cuevas-Otahola, A. Jaramillo-Núñez, and J. Oliveros-Oliveros
Appl. Opt. 58(22) 5976-5981 (2019)
Appl. Opt. 54(6) 1439-1442 (2015)