Abstract

A model describing far-field scattered power and irradiance by a silica glass slab with a shallow-pitted exit surface is experimentally validated. The comparison to the model is performed using a precisely micromachined ensemble of 11μm wide laser ablated shallow pits producing 1% of the incident beam scatter in a 10 mrad angle. A series of samples with damage initiations and laser-induced shallow pits resulting from 351 nm, 5 ns pulsed laser cleaning of metal microparticles at different fluences between 2J/cm2 and 11J/cm2 are characterized as well and found in good agreement with model predictions.

© 2015 Optical Society of America

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