Abstract

The tool influence function (TIF) is critical for calculating the dwell-time map to improve form accuracy. We present the TIF for the process of computer-controlled polishing with a soft polishing wheel. In this paper, the static TIF was developed based on the Preston equation. The pressure distribution was verified by the real removal spot section profiles. According to the experiment measurements, the pressure distribution simulated by Hertz contact theory was much larger than the real contact pressure. The simulated pressure distribution, which was modeled by the Winkler elastic foundation for a soft polishing wheel, matched the real contact pressure. A series of experiments was conducted to obtain the removal spot statistical properties for validating the relationship between material removal and processing time and contact pressure and relative velocity, along with calculating the fitted parameters to establish the TIF. The developed TIF predicted the removal character for the studied soft wheel polishing.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Modeling and validation of polishing tool influence functions for manufacturing segments for an extremely large telescope

Hongyu Li, David Walker, Guoyu Yu, and Wei Zhang
Appl. Opt. 52(23) 5781-5787 (2013)

Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated material removal rate

Zhichao Dong, Haobo Cheng, and Hon-Yuen Tam
Appl. Opt. 53(11) 2455-2464 (2014)

Parametric modeling of edge effects for polishing tool influence functions

Dae Wook Kim, Won Hyun Park, Sug-Whan Kim, and James H. Burge
Opt. Express 17(7) 5656-5665 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Supplementary Material (3)

NameDescription
» Data File 1: CSV (7 KB)      Simulation results of normalized pressure.
» Data File 2: CSV (3 KB)      Experiment parameters set and results.
» Data File 3: CSV (188 KB)      Simulation and measurements of section profile.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (15)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (17)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription