Abstract

A fiber-based profilometer is developed to measure hard-to-access areas. This system utilizes the low-coherence light interferometry technique to detect the internal surface profiles of some samples. A differentiation method is employed to enhance the lateral and vertical resolutions of the measured imaging results. The probe design parameters are optimized for a desired working distance and a small beam size. The performance of the profilometer system, especially its high-resolution property, is demonstrated.

© 2015 Optical Society of America

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