Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems

Not Accessible

Your library or personal account may give you access

Abstract

This paper presents the optical design of a miniature 3D scanning system, which is fully compatible with the vertical integration technology of micro-opto-electro-mechanical systems (MOEMS). The constraints related to this integration strategy are considered, resulting in a simple three-element micro-optical setup based on an afocal scanning microlens doublet and a focusing microlens, which is tolerant to axial position inaccuracy. The 3D scanning is achieved by axial and lateral displacement of microlenses of the scanning doublet, realized by micro-electro-mechanical systems microactuators (the transmission scanning approach). Optical scanning performance of the system is determined analytically by use of the extended ray transfer matrix method, leading to two different optical configurations, relying either on a ball lens or plano–convex microlenses. The presented system is aimed to be a core component of miniature MOEMS-based optical devices, which require a 3D optical scanning function, e.g., miniature imaging systems (confocal or optical coherence microscopes) or optical tweezers.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Varifocal MOEMS fiber scanner for confocal endomicroscopy

Tobias Meinert, Niklas Weber, Hans Zappe, and Andreas Seifert
Opt. Express 22(25) 31529-31544 (2014)

Design of a micro-opto-electro-mechanical-system-based near-infrared hyperspectral imager

Thomas Egloff, Jens Knobbe, Stefan Sinzinger, and Heinrich Grüger
Appl. Opt. 48(34) 6583-6593 (2009)

Micro-opto-electro-mechanical systems accelerometer based on the Talbot effect of double-layer diffraction gratings

Liming Jin, Ce Wang, Li Jin, Wenqing Chen, Haodong Xu, Min Cui, and Mengwei Li
Appl. Opt. 61(18) 5386-5391 (2022)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (17)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (17)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved