Abstract

3D metrology faces increasing demands for higher precision and larger space-bandwidth-speed product (number of 3D points/s). In this paper we consider structured-illumination microscopy as a means for satisfying these demands, developing a theoretical model of the signal formation for both optically smooth and optically rough surfaces. The model allows us to investigate physical limits on precision and to establish rules that allow sensor parameter optimization for greatest precision or highest speed.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Better three-dimensional inspection with structured illumination: speed

Zheng Yang, Alexander Bielke, and Gerd Häusler
Appl. Opt. 55(7) 1713-1719 (2016)

Speckle-structured illumination for 3D phase and fluorescence computational microscopy

Li-Hao Yeh, Shwetadwip Chowdhury, Nicole A. Repina, and Laura Waller
Biomed. Opt. Express 10(7) 3635-3653 (2019)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (50)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription