Abstract

Optical constants of zirconium carbide (ZrC) have been determined in the soft x-ray region of 60–200 Å wavelength using angle-dependent x-ray reflectivity measurements. Reflectivity measurements are carried out at the reflectivity beamline of the Indus-1 synchrotron radiation source. Derived optical constants ($\delta$ and $\beta$) are compared with the tabulated values [At. Data Nucl. Data Tables 54, 181 (1993) [CrossRef]  ]. The optical constants are 15%–35% lower than bulk values in the 60–200 Å wavelength region. Near the Zr M4 edge 187 eV (66.3 Å), the $\delta$ values were close to bulk values with a deviation of 5%–10%. A large deviation of $\sim 20\%$ was found in beta values especially near the Zr M4 edge region, whereas it was in close agreement in the wavelength range away from the edge. To the best of our knowledge, this paper gives the first reported experimental values of optical constants for zirconium carbide in the 60–200 Å wavelength region.

© 2015 Optical Society of America

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