Abstract

In phase-shifting Fizeau interferometers, the phase-shift error and multiple-beam interference are the most common sources of systematic error affecting high-precision phase measurements. The nonsinusoidal waveforms can be minimized by applying synchronous detection with more than 4-sample. However, when the phase-shift calibration is inaccurate, these algorithms cannot eliminate the effects of nonsinusoidal characteristics. Moreover, when measuring the surface profile of highly reflective samples, the calculated phase is critically determined not only by the decrease in the fringe contrast but also by the coupling error between the harmonics and phase-shift error. In this paper, the phase errors calculated by conventional phase-shifting algorithms were estimated by considering the coupling error. We show that the 4N3 algorithm, comprising the polynomial window function and the DFT term, has the smallest phase error among the conventional phase-shifting algorithms. The surface profile of the highly reflective silicon wafer was measured using a wavelength-tuning Fizeau interferometer and the 4N3 algorithm.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi
Opt. Express 23(17) 22928-22938 (2015)

Multiple-surface interferometry of highly reflective wafer by wavelength tuning

Yangjin Kim, Kenichi Hibino, Ryohei Hanayama, Naohiko Sugita, and Mamoru Mitsuishi
Opt. Express 22(18) 21145-21156 (2014)

Compensation for correlated error in multilayer interferometer

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi
Appl. Opt. 55(1) 171-177 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (15)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription