Abstract

In this paper, we present our recent studies on raising the quality of optical coating production with an indirect monochromatic monitoring system. Preproduction error analysis and computational manufacturing are used to estimate potential advantages of application of indirect optical monitoring. It is then demonstrated that a key issue for realization of this advantage is accurate specification of tooling factors for layer thicknesses on test glasses. The tooling factors are precalibrated using single layer depositions and then are corrected using results of reverse engineering for the first production run. It is found that a gradual variation of tooling factors of low index layers is the main error factor in the first deposition run. Finally, we redeposit our coating with a modified monitoring strategy, taking into account this factor. The new experimental results show excellent correspondence with the theoretical spectral performance.

© 2015 Optical Society of America

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