Abstract

We present an interferometric displacement sensor based on a folded low-finesse Fabry–Perot cavity. The fiber-optic sensor uses a quadrature detection scheme based on the wavelength modulation of a DFB laser. This enables measuring position changes over a range of 1 m for velocities up to 2 m/s. The sensor is well suited to work in extreme environments such as ultrahigh vacuum, cryogenic temperatures, or high magnetic fields and supports multichannel applications. The interferometer achieves a repeatability of 0.44nm(3σ) at a working distance of 20 mm, a resolution of 1 pm, and an accuracy of 1 nm.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Sinusoidal phase-modulating self-mixing interferometer with nanometer resolution and improved measurement velocity range

Wei Xia, Qiang Liu, Hui Hao, Dongmei Guo, Ming Wang, and Xuzong Chen
Appl. Opt. 54(26) 7820-7827 (2015)

Dual-modulation fiber Fabry-Perot interferometer with double reflection for slowly-varying displacements

H. C. Seat, P. Chawah, M. Cattoen, A. Sourice, G. Plantier, F. Boudin, J. Chéry, C. Brunet, P. Bernard, and M. Suleiman
Opt. Lett. 37(14) 2886-2888 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (14)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (24)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription