Abstract
We present an interferometric displacement sensor based on a folded low-finesse Fabry–Perot cavity. The fiber-optic sensor uses a quadrature detection scheme based on the wavelength modulation of a DFB laser. This enables measuring position changes over a range of 1 m for velocities up to 2 m/s. The sensor is well suited to work in extreme environments such as ultrahigh vacuum, cryogenic temperatures, or high magnetic fields and supports multichannel applications. The interferometer achieves a repeatability of at a working distance of 20 mm, a resolution of 1 pm, and an accuracy of 1 nm.
© 2015 Optical Society of America
Full Article | PDF ArticleMore Like This
Minhao Zhu, Haoyun Wei, Shijie Zhao, Xuejian Wu, and Yan Li
Appl. Opt. 54(14) 4594-4601 (2015)
Hao Yan, Liuyang Chen, Zhilin Xu, Xiang Lin, and Yurong Liang
Appl. Opt. 61(32) 9569-9575 (2022)
Qianbo Lu, Chen Wang, Jian Bai, Kaiwei Wang, Wenxiu Lian, Shuqi Lou, Xufen Jiao, and Guoguang Yang
Appl. Opt. 54(13) 4188-4196 (2015)