Abstract

Optical windows attached to the sample chamber for ellipsometry measurements often manifest stress-induced retardation. In reality, the retardation is not always small enough to be simplified with the small angle approximation, varies within the optical beam, and furthermore may change with the evolution of the environmental conditions of the chamber. Large retardations and retardation distributions result in complicated Mueller matrices of the input window–sample–output window system. Consequently, extensive computation is required to obtain the true ellipsometric parameters (Δ,Ψ) of the sample. In this paper, we show that the quasi-Newton method can be used to simultaneously obtain 14 unknown parameters (including ellipsometric parameters) from the Mueller matrix, with a single measurement under conditions of large and inhomogeneous window retardation. A limitation of the method is that it is valid only for isotropic samples. The validity of the method has been tested using a set of samples: a silicon substrate, a TiN-coated silicon wafer, and a thermally grown silicon dioxide film. Measurements were done under the window effect and corrected using the proposed method. The corrected results showed excellent agreement with ellipsometric parameters obtained without window effect.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
General window correction method for ellipsometry measurements

Lianhua Jin, Syouki Kasuga, and Eiichi Kondoh
Opt. Express 22(23) 27811-27820 (2014)

Correction of large birefringent effect of windows for in situ ellipsometry measurements

Lianhua Jin and Eiichi Kondoh
Opt. Lett. 39(6) 1549-1552 (2014)

Windows in ellipsometry measurements

Gerald E. Jellison
Appl. Opt. 38(22) 4784-4789 (1999)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (39)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription