Abstract

We present the first, to our knowledge, experimental demonstration of a titanium dioxide slot waveguide operating in the visible range of light. Ring resonators based on slot waveguides were designed, fabricated, and characterized for λ650nm. The fabrication method includes atomic layer deposition, electron beam lithography, and reactive ion etching. The required narrow slot widths of a few tens of nanometers were achieved by using a conformal atomic layer re-coating technique. This unique feature-size-reduction technique was applied after the final etching step.

© 2015 Optical Society of America

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