Abstract

We present the first, to our knowledge, experimental demonstration of a titanium dioxide slot waveguide operating in the visible range of light. Ring resonators based on slot waveguides were designed, fabricated, and characterized for λ650nm. The fabrication method includes atomic layer deposition, electron beam lithography, and reactive ion etching. The required narrow slot widths of a few tens of nanometers were achieved by using a conformal atomic layer re-coating technique. This unique feature-size-reduction technique was applied after the final etching step.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Angled sidewalls in silicon slot waveguides: conformal filling and mode properties

A. Säynätjoki, T. Alasaarela, A. Khanna, L. Karvonen, P. Stenberg, M. Kuittinen, A. Tervonen, and S. Honkanen
Opt. Express 17(23) 21066-21076 (2009)

Strip-loaded horizontal slot waveguide

Matthieu Roussey, Leila Ahmadi, Ségolène Pélisset, Markus Häyrinen, Arijit Bera, Ville Kontturi, Janne Laukkanen, Ismo Vartiainen, Seppo Honkanen, and Markku Kuittinen
Opt. Lett. 42(2) 211-214 (2017)

Strip-loaded waveguide on titanium dioxide thin films by nanoimprint replication

Leila Ahmadi, Ville Kontturi, Janne Laukkanen, Jyrki Saarinen, Seppo Honkanen, Markku Kuittinen, and Matthieu Roussey
Opt. Lett. 42(3) 527-530 (2017)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription