Abstract

As a low refractive index material widely used in coatings for deep-ultraviolet optical systems, magnesium fluoride (MgF2) films were prepared by electron beam evaporation at different substrate temperatures. The effects of the substrate temperatures on the optical properties in vacuum and in air, microstructures, and composition were investigated, as were the microstructures, their composition, and the relation between them. In vacuum, the substrate temperature directly affected the microstructures which dominated the packing density and inhomogeneity along the film thickness. When the films were exposed to air, the refractive index increased and a nonmonotonic change trend of the refractive index with substrate temperature was observed due to adsorbed water and magnesium oxide (MgO) formed in the film. While a moderate amount of MgO reduced absorption loss by decreasing vacancy defects, excessive MgO increased the absorption loss because of the high extinction coefficient of the oxide.

© 2014 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Effects of substrate temperatures and deposition rates on properties of aluminum fluoride thin films in deep-ultraviolet region

Jian Sun, Xu Li, Weili Zhang, Kui Yi, and Jianda Shao
Appl. Opt. 51(35) 8481-8489 (2012)

Influence of substrate temperatures on the properties of GdF3 thin films with quarter-wave thickness in the ultraviolet region

Jingcheng Jin, Chunshui Jin, Chun Li, Wenyuan Deng, and Shun Yao
Appl. Opt. 54(16) 5117-5122 (2015)

Microstructure of magnesium fluoride films deposited by boat evaporation at 193 nm

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 45(28) 7319-7324 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription