Abstract

Light-scattering measurements on rugate coatings made out of mixtures of SixTayOz and SixHfyOz were performed. Through successive optimization steps for the substrate roughness and deposition parameters, the overall scattering loss could be reduced by 96% to 3.5 ppm. In order to analyze the relevant scattering mechanisms in such coatings, different theoretical models for scattering from bulk and surface imperfections are compared to measured data. The best accordance between simulated and measured data could be achieved for the theory based on bulk imperfections, while the classical roughness based theory, which is used for conventional multilayer systems, gives reasonable good results.

© 2014 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Scattering reduction through oblique multilayer deposition

Marcus Trost, Tobias Herffurth, Sven Schröder, Angela Duparré, and Andreas Tünnermann
Appl. Opt. 53(4) A197-A204 (2014)

Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers

Marcus Trost, Sven Schröder, Torsten Feigl, Angela Duparré, and Andreas Tünnermann
Appl. Opt. 50(9) C148-C153 (2011)

Interfacial roughness and related scatter in ultraviolet optical coatings: a systematic experimental approach

Stefan Jakobs, Angela Duparré, and Horst Truckenbrodt
Appl. Opt. 37(7) 1180-1193 (1998)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (10)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription