Abstract

Optical thin films are used to control the reflectance and transmittance of optical components. However, conventional deposition technologies applicable to organic (plastic) substrates typically result in weak adhesion. We overcame this problem by using vacuum deposition in combination with sputtering to directly deposit a SiO2 optical thin film onto an acrylic resin substrate. We observed neither yellowing nor deformation. The hardness of the film is 2H as measured by the pencil hardness test, indicating successful modulation of optical properties without sacrificing substrate hardness.

© 2014 Optical Society of America

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References

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  1. J. Allen and A. Tregunna, “Antireflection coatings for plastic optics,” J. Phys. D 21, S92–S95 (1988).
    [CrossRef]
  2. P. Munzert, C. Praefke, U. Schulz, and N. Kaiser, “Adhesion of vacuum deposited optical coatings on PMMA and polycarbonate,” J. Adhes. Sci. Technol. 26, 2269–2276 (2012).
  3. U. Schulz, P. Munzert, and N. Kaiser, “Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion,” Surf. Coat. Technol. 142–144, 507–511 (2001).
    [CrossRef]
  4. J. E. Klembeg-Sapieha, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, “Tailoring the adhesion of optical films on polymethyl-methacrylate by plasma-induced surface stabilization,” Thin Solid Films 476, 101–107 (2005).
    [CrossRef]
  5. Ph. Duchatelard, G. Baud, J. P. Besse, and M. Jacquet, “Alumina coatings on PMMA: optimization of adherence,” Thin Solid Films 250, 142–150 (1994).
    [CrossRef]
  6. International Organization of Standardization, “Optics and photonics—Optical coatings—Part 4: specific test methods,” (2012).
  7. “Testing method for paints—Part 5: mechanical property of film—Section 4: scratch hardness (Pencil method),” (1999).

2012

P. Munzert, C. Praefke, U. Schulz, and N. Kaiser, “Adhesion of vacuum deposited optical coatings on PMMA and polycarbonate,” J. Adhes. Sci. Technol. 26, 2269–2276 (2012).

2005

J. E. Klembeg-Sapieha, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, “Tailoring the adhesion of optical films on polymethyl-methacrylate by plasma-induced surface stabilization,” Thin Solid Films 476, 101–107 (2005).
[CrossRef]

2001

U. Schulz, P. Munzert, and N. Kaiser, “Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion,” Surf. Coat. Technol. 142–144, 507–511 (2001).
[CrossRef]

1994

Ph. Duchatelard, G. Baud, J. P. Besse, and M. Jacquet, “Alumina coatings on PMMA: optimization of adherence,” Thin Solid Films 250, 142–150 (1994).
[CrossRef]

1988

J. Allen and A. Tregunna, “Antireflection coatings for plastic optics,” J. Phys. D 21, S92–S95 (1988).
[CrossRef]

Allen, J.

J. Allen and A. Tregunna, “Antireflection coatings for plastic optics,” J. Phys. D 21, S92–S95 (1988).
[CrossRef]

Baud, G.

Ph. Duchatelard, G. Baud, J. P. Besse, and M. Jacquet, “Alumina coatings on PMMA: optimization of adherence,” Thin Solid Films 250, 142–150 (1994).
[CrossRef]

Besse, J. P.

Ph. Duchatelard, G. Baud, J. P. Besse, and M. Jacquet, “Alumina coatings on PMMA: optimization of adherence,” Thin Solid Films 250, 142–150 (1994).
[CrossRef]

Duchatelard, Ph.

Ph. Duchatelard, G. Baud, J. P. Besse, and M. Jacquet, “Alumina coatings on PMMA: optimization of adherence,” Thin Solid Films 250, 142–150 (1994).
[CrossRef]

Jacquet, M.

Ph. Duchatelard, G. Baud, J. P. Besse, and M. Jacquet, “Alumina coatings on PMMA: optimization of adherence,” Thin Solid Films 250, 142–150 (1994).
[CrossRef]

Kaiser, N.

P. Munzert, C. Praefke, U. Schulz, and N. Kaiser, “Adhesion of vacuum deposited optical coatings on PMMA and polycarbonate,” J. Adhes. Sci. Technol. 26, 2269–2276 (2012).

U. Schulz, P. Munzert, and N. Kaiser, “Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion,” Surf. Coat. Technol. 142–144, 507–511 (2001).
[CrossRef]

Klembeg-Sapieha, J. E.

J. E. Klembeg-Sapieha, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, “Tailoring the adhesion of optical films on polymethyl-methacrylate by plasma-induced surface stabilization,” Thin Solid Films 476, 101–107 (2005).
[CrossRef]

Lantman, C. W.

J. E. Klembeg-Sapieha, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, “Tailoring the adhesion of optical films on polymethyl-methacrylate by plasma-induced surface stabilization,” Thin Solid Films 476, 101–107 (2005).
[CrossRef]

Martinu, L.

J. E. Klembeg-Sapieha, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, “Tailoring the adhesion of optical films on polymethyl-methacrylate by plasma-induced surface stabilization,” Thin Solid Films 476, 101–107 (2005).
[CrossRef]

Munzert, P.

P. Munzert, C. Praefke, U. Schulz, and N. Kaiser, “Adhesion of vacuum deposited optical coatings on PMMA and polycarbonate,” J. Adhes. Sci. Technol. 26, 2269–2276 (2012).

U. Schulz, P. Munzert, and N. Kaiser, “Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion,” Surf. Coat. Technol. 142–144, 507–511 (2001).
[CrossRef]

Praefke, C.

P. Munzert, C. Praefke, U. Schulz, and N. Kaiser, “Adhesion of vacuum deposited optical coatings on PMMA and polycarbonate,” J. Adhes. Sci. Technol. 26, 2269–2276 (2012).

Schulz, U.

P. Munzert, C. Praefke, U. Schulz, and N. Kaiser, “Adhesion of vacuum deposited optical coatings on PMMA and polycarbonate,” J. Adhes. Sci. Technol. 26, 2269–2276 (2012).

U. Schulz, P. Munzert, and N. Kaiser, “Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion,” Surf. Coat. Technol. 142–144, 507–511 (2001).
[CrossRef]

Tregunna, A.

J. Allen and A. Tregunna, “Antireflection coatings for plastic optics,” J. Phys. D 21, S92–S95 (1988).
[CrossRef]

Yamasaki, N. L. S.

J. E. Klembeg-Sapieha, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, “Tailoring the adhesion of optical films on polymethyl-methacrylate by plasma-induced surface stabilization,” Thin Solid Films 476, 101–107 (2005).
[CrossRef]

J. Adhes. Sci. Technol.

P. Munzert, C. Praefke, U. Schulz, and N. Kaiser, “Adhesion of vacuum deposited optical coatings on PMMA and polycarbonate,” J. Adhes. Sci. Technol. 26, 2269–2276 (2012).

J. Phys. D

J. Allen and A. Tregunna, “Antireflection coatings for plastic optics,” J. Phys. D 21, S92–S95 (1988).
[CrossRef]

Surf. Coat. Technol.

U. Schulz, P. Munzert, and N. Kaiser, “Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion,” Surf. Coat. Technol. 142–144, 507–511 (2001).
[CrossRef]

Thin Solid Films

J. E. Klembeg-Sapieha, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, “Tailoring the adhesion of optical films on polymethyl-methacrylate by plasma-induced surface stabilization,” Thin Solid Films 476, 101–107 (2005).
[CrossRef]

Ph. Duchatelard, G. Baud, J. P. Besse, and M. Jacquet, “Alumina coatings on PMMA: optimization of adherence,” Thin Solid Films 250, 142–150 (1994).
[CrossRef]

Other

International Organization of Standardization, “Optics and photonics—Optical coatings—Part 4: specific test methods,” (2012).

“Testing method for paints—Part 5: mechanical property of film—Section 4: scratch hardness (Pencil method),” (1999).

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Figures (7)

Fig. 1.
Fig. 1.

Schematic diagram of combination coating equipment (sputtering and vacuum deposition).

Fig. 2.
Fig. 2.

Spectral transmission of thin films (sputtering deposition). r.f. power (a) 100 W. (b) 200 W. (c) 300 W.

Fig. 3.
Fig. 3.

Spectral transmission of thin films (sputtering and vacuum deposition).

Fig. 4.
Fig. 4.

Cross-hatch test results of SiO2 films deposited by using sputtering deposition.

Fig. 5.
Fig. 5.

Internal stress of SiO2 films deposited by using sputtering deposition.

Fig. 6.
Fig. 6.

Cross-hatch test results of SiO2 films deposited by sputtering and vacuum deposition.

Fig. 7.
Fig. 7.

Internal stress test results of SiO2 films deposited by sputtering and vacuum deposition.

Tables (4)

Tables Icon

Table 1. Sputtering Deposition Conditions

Tables Icon

Table 2. Sputtering and Vacuum Deposition Conditions

Tables Icon

Table 3. Pencil Hardness Test Results of SiO2 Films Deposited by Sputtering Deposition

Tables Icon

Table 4. Pencil Hardness Test Results of SiO2 Films Deposited by Sputtering and Vacuum Deposition

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