Ion-beam-sputtering (IBS) single-layer and multilayer coating designs for UV applications were examined after the deposition process as well as after a defined postdeposition treatment. High internal compressive film stress as well as moderate absorption losses in the UV spectral range were measured at the as-deposited thin films. Due to a controlled postdeposition treatment process, the absorption losses and the high compressive stress can be reduced significantly. We show that the remaining thin-film stress of and multilayer designs can be specifically manipulated by the parameters of the postdeposition treatment. Even zero and tensile stress can be achieved for complex multilayer coatings.
© 2014 Optical Society of AmericaFull Article | PDF Article
Detlev Ristau, Stefan Günster, Salvador Bosch, Angela Duparré, Enrico Masetti, Josep Ferré-Borrull, George Kiriakidis, Francesca Peiró, Etienne Quesnel, and Alexander Tikhonravov
Appl. Opt. 41(16) 3196-3204 (2002)
Roland Thielsch, Alexandre Gatto, and Norbert Kaiser
Appl. Opt. 41(16) 3211-3217 (2002)
Laurent Gallais, Jérémie Capoulade, Jean-Yves Natoli, Mireille Commandré, Michel Cathelinaud, Cian Koc, and Michel Lequime
Appl. Opt. 47(13) C107-C113 (2008)