Abstract
In this paper, we have demonstrated an effective method for fabricating disordered subwavelength structures (d-SWSs) on fused silica using thermal dewetted Ag nanoparticles at lower temperatures () with a vacuum. Theoretically and experimentally, we investigate the effects of the film thickness, annealing temperature, and etching time on the antireflective properties of the d-SWS arrays. The measured data and calculated results obtained by rigorous coupled-wave analysis exhibit reasonably similar tendencies. For the sample with a 10-nm-thick Ag film, good optical transmission characteristics (on one side, ) over a wide wavelength region of 500–1300 nm were obtained, and a maximum value of at a wavelength of 850 nm was also obtained. Furthermore, the d-SWSs exhibit excellent optical and thermal stability at high temperatures of 800°C and 1000°C compared to a conventional multilayer coating.
© 2014 Optical Society of America
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