Abstract

The performance of optical coatings may be negatively affected by the deleterious effects of mechanical stress. In this work, we propose an optimization tool for the design of optical filters taking into account both the optical and mechanical properties of the substrate and of the individual deposited layers. The proposed method has been implemented as a supplemental module in the OpenFilters open source design software. It has been experimentally validated by fabricating multilayer stacks using e-beam evaporation, in combination with their mechanical stress assessment performed as a function of temperature. Two different stress-compensation strategies were evaluated: (a) design of two complementary coatings on either side of the substrate and (b) implementing the mechanical properties of the individual materials in the design of the optical coating on one side only. This approach has been tested by the manufacture of a Fabry–Perot etalon used in astronomy while using evaporated SiO2 and TiO2 films. We found that the substrate curvature can be decreased by 85% and 49% for the first and second strategies, respectively.

© 2014 Optical Society of America

Full Article  |  PDF Article
Related Articles
Internal stress and optical properties of Nb2O5 thin films deposited by ion-beam sputtering

Cheng-Chung Lee, Chuen-Lin Tien, and Jin-Cherng Hsu
Appl. Opt. 41(10) 2043-2047 (2002)

Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region

Roland Thielsch, Alexandre Gatto, and Norbert Kaiser
Appl. Opt. 41(16) 3211-3217 (2002)

TiO2-Ta2O5 composite thin films deposited by radio frequency ion-beam sputtering

Cheng-Chung Lee and Chien-Jen Tang
Appl. Opt. 45(36) 9125-9131 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription