Abstract

We report a way to shape surfaces by optimizing the path instead of changing the removal function of a polishing tool for magnetorheological jet polishing (MJP). The M-shaped removal function of MJP generates a track with a W-shaped profile along one path. However, applying two parallel paths with appropriate line spacing can obtain a track with V-shaped profile, which has a removal distribution similar to that by using the Gaussian removal function along one path. Based on this, a multiplex path applying an M-shaped removal function is constructed in an actual process. A transformation model describing the relationship between the M-shaped removal function and the Gaussian removal function is established, which is crucial to determine the velocity function on the multiplex path. By using the M-shaped removal function, we have planned new processing steps by applying the multiplex path and the velocity function for full aperture polishing. Polishing performance is designed and demonstrated on two K9 work-pieces with different multiplex paths. The form error on 23 mm diameter is decreased from 0.256λ PV (λ=632.8  nm) and 0.068λ RMS to 0.038λ PV and 0.005λ RMS with scanning multiplex path. Results indicate that this method of path optimization is suitable for optical manufacturing.

© 2014 Optical Society of America

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  1. W. I. Kordonski, A. B. Shorey, and M. Tricard, “Magnetorheological jet (MR JetTM) finishing technology,” J. Fluids Eng. 128, 20–26 (2006).
    [CrossRef]
  2. M. Tricard, W. I. Kordonski, and A. B. Shorey, “Magnetorheological jet finishing of conformal, freeform and steep concave optics,” CIRP Annals 55, 309–312 (2006).
    [CrossRef]
  3. W. Kordonski and A. Shorey, “Magnetorheological (MR) jet finishing technology,” J. Intell. Mater. Syst. Struct. 18, 1127–1130 (2007).
    [CrossRef]
  4. T. Wang, H. B. Cheng, Y. Chen, Y. P. Feng, Z. C. Dong, and H. Y. Tam, “Correction of remounting errors by masking reference points in small footprint polishing process,” Appl. Opt. 52, 7851–7858 (2013).
    [CrossRef]
  5. S. M. Booij, H. V. Brug, J. J. M. Braat, and O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
    [CrossRef]
  6. H. Fang, P. J. Guo, and J. C. Yu, “Optimization of the material removal in fluid jet polishing,” Opt. Eng. 45, 053401 (2006).
    [CrossRef]
  7. T. Wang, H. B. Cheng, Z. C. Dong, and H. Y. Tam, “Removal character of vertical jet polishing with eccentric rotation motion using magnetorheological fluid,” J. Mater. Process. Technol. 213, 1532–1537 (2013).
    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]

2013 (3)

2012 (1)

2010 (2)

H. Y. Tam and H. B. Cheng, “An investigation of the effects of the tool path on the removal of material in polishing,” J. Mater. Process. Technol. 210, 807–818 (2010).
[CrossRef]

C. Y. Shi, J. H. Yuan, F. Wu, X. Hou, and Y. J. Wan, “Material removal model of vertical impinging in fluid jet polishing,” Chin. Opt. Lett. 8, 323–325 (2010).
[CrossRef]

2008 (1)

2007 (1)

W. Kordonski and A. Shorey, “Magnetorheological (MR) jet finishing technology,” J. Intell. Mater. Syst. Struct. 18, 1127–1130 (2007).
[CrossRef]

2006 (3)

W. I. Kordonski, A. B. Shorey, and M. Tricard, “Magnetorheological jet (MR JetTM) finishing technology,” J. Fluids Eng. 128, 20–26 (2006).
[CrossRef]

M. Tricard, W. I. Kordonski, and A. B. Shorey, “Magnetorheological jet finishing of conformal, freeform and steep concave optics,” CIRP Annals 55, 309–312 (2006).
[CrossRef]

H. Fang, P. J. Guo, and J. C. Yu, “Optimization of the material removal in fluid jet polishing,” Opt. Eng. 45, 053401 (2006).
[CrossRef]

2002 (1)

S. M. Booij, H. V. Brug, J. J. M. Braat, and O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

Beaucamp, A.

Booij, S. M.

S. M. Booij, H. V. Brug, J. J. M. Braat, and O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

Braat, J. J. M.

S. M. Booij, H. V. Brug, J. J. M. Braat, and O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

Brug, H. V.

S. M. Booij, H. V. Brug, J. J. M. Braat, and O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

Chen, Y.

Cheng, H. B.

T. Wang, H. B. Cheng, Y. Chen, Y. P. Feng, Z. C. Dong, and H. Y. Tam, “Correction of remounting errors by masking reference points in small footprint polishing process,” Appl. Opt. 52, 7851–7858 (2013).
[CrossRef]

T. Wang, H. B. Cheng, Z. C. Dong, and H. Y. Tam, “Removal character of vertical jet polishing with eccentric rotation motion using magnetorheological fluid,” J. Mater. Process. Technol. 213, 1532–1537 (2013).
[CrossRef]

H. Y. Tam, H. B. Cheng, and Z. C. Dong, “Peano-like paths for subaperture polishing of optical aspherical surfaces,” Appl. Opt. 52, 3624–3636 (2013).
[CrossRef]

H. Y. Tam and H. B. Cheng, “An investigation of the effects of the tool path on the removal of material in polishing,” J. Mater. Process. Technol. 210, 807–818 (2010).
[CrossRef]

Dong, Z. C.

Dunn, C. R.

Evans, R.

Fähnle, O. W.

S. M. Booij, H. V. Brug, J. J. M. Braat, and O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

Fang, H.

H. Fang, P. J. Guo, and J. C. Yu, “Optimization of the material removal in fluid jet polishing,” Opt. Eng. 45, 053401 (2006).
[CrossRef]

Feng, Y. P.

Guo, P. J.

H. Fang, P. J. Guo, and J. C. Yu, “Optimization of the material removal in fluid jet polishing,” Opt. Eng. 45, 053401 (2006).
[CrossRef]

Hou, X.

Kordonski, W.

W. Kordonski and A. Shorey, “Magnetorheological (MR) jet finishing technology,” J. Intell. Mater. Syst. Struct. 18, 1127–1130 (2007).
[CrossRef]

Kordonski, W. I.

W. I. Kordonski, A. B. Shorey, and M. Tricard, “Magnetorheological jet (MR JetTM) finishing technology,” J. Fluids Eng. 128, 20–26 (2006).
[CrossRef]

M. Tricard, W. I. Kordonski, and A. B. Shorey, “Magnetorheological jet finishing of conformal, freeform and steep concave optics,” CIRP Annals 55, 309–312 (2006).
[CrossRef]

Li, H. Y.

Messelink, W.

Shi, C. Y.

Shorey, A.

W. Kordonski and A. Shorey, “Magnetorheological (MR) jet finishing technology,” J. Intell. Mater. Syst. Struct. 18, 1127–1130 (2007).
[CrossRef]

Shorey, A. B.

W. I. Kordonski, A. B. Shorey, and M. Tricard, “Magnetorheological jet (MR JetTM) finishing technology,” J. Fluids Eng. 128, 20–26 (2006).
[CrossRef]

M. Tricard, W. I. Kordonski, and A. B. Shorey, “Magnetorheological jet finishing of conformal, freeform and steep concave optics,” CIRP Annals 55, 309–312 (2006).
[CrossRef]

Tam, H. Y.

T. Wang, H. B. Cheng, Y. Chen, Y. P. Feng, Z. C. Dong, and H. Y. Tam, “Correction of remounting errors by masking reference points in small footprint polishing process,” Appl. Opt. 52, 7851–7858 (2013).
[CrossRef]

T. Wang, H. B. Cheng, Z. C. Dong, and H. Y. Tam, “Removal character of vertical jet polishing with eccentric rotation motion using magnetorheological fluid,” J. Mater. Process. Technol. 213, 1532–1537 (2013).
[CrossRef]

H. Y. Tam, H. B. Cheng, and Z. C. Dong, “Peano-like paths for subaperture polishing of optical aspherical surfaces,” Appl. Opt. 52, 3624–3636 (2013).
[CrossRef]

H. Y. Tam and H. B. Cheng, “An investigation of the effects of the tool path on the removal of material in polishing,” J. Mater. Process. Technol. 210, 807–818 (2010).
[CrossRef]

Tricard, M.

M. Tricard, W. I. Kordonski, and A. B. Shorey, “Magnetorheological jet finishing of conformal, freeform and steep concave optics,” CIRP Annals 55, 309–312 (2006).
[CrossRef]

W. I. Kordonski, A. B. Shorey, and M. Tricard, “Magnetorheological jet (MR JetTM) finishing technology,” J. Fluids Eng. 128, 20–26 (2006).
[CrossRef]

Walker, D. D.

Wan, Y. J.

Wang, T.

T. Wang, H. B. Cheng, Y. Chen, Y. P. Feng, Z. C. Dong, and H. Y. Tam, “Correction of remounting errors by masking reference points in small footprint polishing process,” Appl. Opt. 52, 7851–7858 (2013).
[CrossRef]

T. Wang, H. B. Cheng, Z. C. Dong, and H. Y. Tam, “Removal character of vertical jet polishing with eccentric rotation motion using magnetorheological fluid,” J. Mater. Process. Technol. 213, 1532–1537 (2013).
[CrossRef]

Wu, F.

Yu, G. Y.

Yu, J. C.

H. Fang, P. J. Guo, and J. C. Yu, “Optimization of the material removal in fluid jet polishing,” Opt. Eng. 45, 053401 (2006).
[CrossRef]

Yuan, J. H.

Appl. Opt. (2)

Chin. Opt. Lett. (1)

CIRP Annals (1)

M. Tricard, W. I. Kordonski, and A. B. Shorey, “Magnetorheological jet finishing of conformal, freeform and steep concave optics,” CIRP Annals 55, 309–312 (2006).
[CrossRef]

J. Fluids Eng. (1)

W. I. Kordonski, A. B. Shorey, and M. Tricard, “Magnetorheological jet (MR JetTM) finishing technology,” J. Fluids Eng. 128, 20–26 (2006).
[CrossRef]

J. Intell. Mater. Syst. Struct. (1)

W. Kordonski and A. Shorey, “Magnetorheological (MR) jet finishing technology,” J. Intell. Mater. Syst. Struct. 18, 1127–1130 (2007).
[CrossRef]

J. Mater. Process. Technol. (2)

T. Wang, H. B. Cheng, Z. C. Dong, and H. Y. Tam, “Removal character of vertical jet polishing with eccentric rotation motion using magnetorheological fluid,” J. Mater. Process. Technol. 213, 1532–1537 (2013).
[CrossRef]

H. Y. Tam and H. B. Cheng, “An investigation of the effects of the tool path on the removal of material in polishing,” J. Mater. Process. Technol. 210, 807–818 (2010).
[CrossRef]

Opt. Eng. (2)

S. M. Booij, H. V. Brug, J. J. M. Braat, and O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

H. Fang, P. J. Guo, and J. C. Yu, “Optimization of the material removal in fluid jet polishing,” Opt. Eng. 45, 053401 (2006).
[CrossRef]

Opt. Express (2)

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