Abstract

A new interferometric method for ultra-precise measurement of laser-beam angular deflection is proposed. The angular tilt of a measuring device in relation to the beam axis also can be measured. The method is based on interference fringe period analysis in the selected plane of measurement. The theoretical basis and experimental verification of the method are presented. It is shown that by using the proposed technique, it is possible to measure the laser beam angular deflection or instability with ultrahigh resolution reaching single nanoradians. The proposed method allows the measurement and further compensation of laser beam deflections in a very compact design.

© 2013 Optical Society of America

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