Abstract

We present a fast phase-shifting shadow moiré device for surface topography measurement. In our setup, multiple light sources located at different positions are controlled to illuminate the grating sequentially. Therefore, the phase shift across the field of view shadow moiré is introduced by changing the distance between the light source and the camera. Thanks to the necessity for mechanical movement being omitted here, the proposed setup can capture the phase-shifting fringe patterns at a high speed. However, affected by the bias modulation and amplitude modulation of the captured fringe patterns, the phase of interest cannot be demodulated by the standard phase-shifting algorithm directly. Thus the principal component analysis (PCA) demodulation approach is used to extract the wrapped phase map. In addition, we develop an iterative procedure to reduce the detuning error introduced by the PCA algorithm. The proposed method implements a fast way to determine the topography of a surface through a simple experimental setup. It is applied to obtain an external surface of a specimen. Both the simulation results and the experimental results show the validity of the proposed technique.

© 2013 Optical Society of America

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