Abstract

As a key element in point-diffraction interferometer (PDI), the diffraction pinhole determines the sphericity of the reference wavefront and achievable precision of the testing system. The point-diffraction wavefront error, aperture angle, and light transmittance in the PDI operating at visible light, which are determined by pinhole dimension, are analyzed based on finite difference time domain (FDTD) method. The study shows that an aperture angle about 75° can be obtained with a 1 μm pinhole diameter, and the corresponding testing precision is better than root mean square λ/1000 within 0.35 NA. Both the numerical simulation and experiments have been carried out to demonstrate the feasibility of the proposed analysis approach, and a good agreement is obtained between calculated and measured parameters in visible-light PDI. The proposed simulation approach with the FDTD method provides a feasible way to analyze the diffraction wavefront in visible-light PDI, as well as a powerful tool for the design and optimization of PDI system.

© 2013 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
    [CrossRef]
  2. S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
    [CrossRef]
  3. H. Kihm and Y.-W. Lee, “Double-pass point diffraction interferometer,” Meas. Sci. Technol. 21, 105307 (2010).
    [CrossRef]
  4. D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Polarization point-diffraction interferometer for high-precision testing of spherical surface,” Proc. SPIE 7656, 76560F (2010).
    [CrossRef]
  5. D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces,” Appl. Opt. 50, 2342–2348 (2011).
    [CrossRef]
  6. K. Otaki, F. Bonneau, and Y. Ichihara, “Absolute measurement of spherical surface by point diffraction interferometer,” Proc. SPIE 3740, 602–605 (1999).
    [CrossRef]
  7. K. Otaki, K. Ota, T. Yamamoto, Y. Fukuda, I. Nishiyama, and S. Okazaki, “Accuracy evaluation of point diffraction interferometer for EUVL mirror,” in Microprocesses and Nanotechnology 2001, Digest of Papers (Business Center or Academic Societies Japan, 2001), pp. 290–291.
  8. M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
    [CrossRef]
  9. P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).
  10. L. F. Chen and D. G. Sha, “Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer,” Proc. SPIE 6834, 68342N (2008).
    [CrossRef]
  11. H. Jun, N. Liang, Y. Xun, J. Xu, and W. Fang, “Rigorous accuracy analysis of the fiber point diffraction interferometer,” Proc. SPIE 7155, 71552Z (2008).
  12. K. A. Goldberg, E. Tejnil, and J. Bokor, “A 3-D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry,” OSA Trends Opt. Photonics Ser. 4, 133–137 (1996).
  13. K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
    [CrossRef]
  14. Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
    [CrossRef]
  15. J. A. Kong, Electromagnetic Wave Theory (Wiley, 1986).

2011 (1)

2010 (2)

H. Kihm and Y.-W. Lee, “Double-pass point diffraction interferometer,” Meas. Sci. Technol. 21, 105307 (2010).
[CrossRef]

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Polarization point-diffraction interferometer for high-precision testing of spherical surface,” Proc. SPIE 7656, 76560F (2010).
[CrossRef]

2008 (2)

L. F. Chen and D. G. Sha, “Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer,” Proc. SPIE 6834, 68342N (2008).
[CrossRef]

H. Jun, N. Liang, Y. Xun, J. Xu, and W. Fang, “Rigorous accuracy analysis of the fiber point diffraction interferometer,” Proc. SPIE 7155, 71552Z (2008).

2006 (1)

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

2005 (1)

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

2004 (1)

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

2003 (1)

K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
[CrossRef]

2001 (1)

K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
[CrossRef]

2000 (1)

P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).

1999 (1)

K. Otaki, F. Bonneau, and Y. Ichihara, “Absolute measurement of spherical surface by point diffraction interferometer,” Proc. SPIE 3740, 602–605 (1999).
[CrossRef]

1996 (1)

K. A. Goldberg, E. Tejnil, and J. Bokor, “A 3-D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry,” OSA Trends Opt. Photonics Ser. 4, 133–137 (1996).

Attwood, D.

P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).

Bokor, J.

P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).

K. A. Goldberg, E. Tejnil, and J. Bokor, “A 3-D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry,” OSA Trends Opt. Photonics Ser. 4, 133–137 (1996).

Bonneau, F.

K. Otaki, F. Bonneau, and Y. Ichihara, “Absolute measurement of spherical surface by point diffraction interferometer,” Proc. SPIE 3740, 602–605 (1999).
[CrossRef]

Chang, C.

P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).

Chen, C.

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces,” Appl. Opt. 50, 2342–2348 (2011).
[CrossRef]

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Polarization point-diffraction interferometer for high-precision testing of spherical surface,” Proc. SPIE 7656, 76560F (2010).
[CrossRef]

Chen, L. F.

L. F. Chen and D. G. Sha, “Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer,” Proc. SPIE 6834, 68342N (2008).
[CrossRef]

Decker, T. A.

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Fang, W.

H. Jun, N. Liang, Y. Xun, J. Xu, and W. Fang, “Rigorous accuracy analysis of the fiber point diffraction interferometer,” Proc. SPIE 7155, 71552Z (2008).

Fukuda, Y.

K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
[CrossRef]

K. Otaki, K. Ota, T. Yamamoto, Y. Fukuda, I. Nishiyama, and S. Okazaki, “Accuracy evaluation of point diffraction interferometer for EUVL mirror,” in Microprocesses and Nanotechnology 2001, Digest of Papers (Business Center or Academic Societies Japan, 2001), pp. 290–291.

Gemma, T.

K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
[CrossRef]

Goldberg, K. A.

P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).

K. A. Goldberg, E. Tejnil, and J. Bokor, “A 3-D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry,” OSA Trends Opt. Photonics Ser. 4, 133–137 (1996).

Gomei, Y.

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Hara, S.

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Hasegawa, M.

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Hasegawa, T.

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Ichihara, Y.

K. Otaki, F. Bonneau, and Y. Ichihara, “Absolute measurement of spherical surface by point diffraction interferometer,” Proc. SPIE 3740, 602–605 (1999).
[CrossRef]

Ishii, M.

K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
[CrossRef]

Johnson, M. A.

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Jun, H.

H. Jun, N. Liang, Y. Xun, J. Xu, and W. Fang, “Rigorous accuracy analysis of the fiber point diffraction interferometer,” Proc. SPIE 7155, 71552Z (2008).

Kakuchi, O.

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Kato, S.

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Kihm, H.

H. Kihm and Y.-W. Lee, “Double-pass point diffraction interferometer,” Meas. Sci. Technol. 21, 105307 (2010).
[CrossRef]

Kong, J. A.

J. A. Kong, Electromagnetic Wave Theory (Wiley, 1986).

Kuramoto, Y.

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Lee, S. H.

P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).

Lee, Y.-W.

H. Kihm and Y.-W. Lee, “Double-pass point diffraction interferometer,” Meas. Sci. Technol. 21, 105307 (2010).
[CrossRef]

Liang, N.

H. Jun, N. Liang, Y. Xun, J. Xu, and W. Fang, “Rigorous accuracy analysis of the fiber point diffraction interferometer,” Proc. SPIE 7155, 71552Z (2008).

Murakami, K.

K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
[CrossRef]

Nakayama, S.

K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
[CrossRef]

Naulleau, P.

P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).

Nishiyama, I.

K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
[CrossRef]

K. Otaki, K. Ota, T. Yamamoto, Y. Fukuda, I. Nishiyama, and S. Okazaki, “Accuracy evaluation of point diffraction interferometer for EUVL mirror,” in Microprocesses and Nanotechnology 2001, Digest of Papers (Business Center or Academic Societies Japan, 2001), pp. 290–291.

Okazaki, S.

K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
[CrossRef]

K. Otaki, K. Ota, T. Yamamoto, Y. Fukuda, I. Nishiyama, and S. Okazaki, “Accuracy evaluation of point diffraction interferometer for EUVL mirror,” in Microprocesses and Nanotechnology 2001, Digest of Papers (Business Center or Academic Societies Japan, 2001), pp. 290–291.

Ota, K.

K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
[CrossRef]

K. Otaki, K. Ota, T. Yamamoto, Y. Fukuda, I. Nishiyama, and S. Okazaki, “Accuracy evaluation of point diffraction interferometer for EUVL mirror,” in Microprocesses and Nanotechnology 2001, Digest of Papers (Business Center or Academic Societies Japan, 2001), pp. 290–291.

Otaki, K.

K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
[CrossRef]

K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
[CrossRef]

K. Otaki, F. Bonneau, and Y. Ichihara, “Absolute measurement of spherical surface by point diffraction interferometer,” Proc. SPIE 3740, 602–605 (1999).
[CrossRef]

K. Otaki, K. Ota, T. Yamamoto, Y. Fukuda, I. Nishiyama, and S. Okazaki, “Accuracy evaluation of point diffraction interferometer for EUVL mirror,” in Microprocesses and Nanotechnology 2001, Digest of Papers (Business Center or Academic Societies Japan, 2001), pp. 290–291.

Ouchi, C.

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Phillion, D. W.

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Sekine, Y.

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Sha, D. G.

L. F. Chen and D. G. Sha, “Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer,” Proc. SPIE 6834, 68342N (2008).
[CrossRef]

Sommargren, G. E.

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Suzuki, A.

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Takeuchi, S.

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Taylor, J. S.

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Tejnil, E.

K. A. Goldberg, E. Tejnil, and J. Bokor, “A 3-D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry,” OSA Trends Opt. Photonics Ser. 4, 133–137 (1996).

Wang, D.

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces,” Appl. Opt. 50, 2342–2348 (2011).
[CrossRef]

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Polarization point-diffraction interferometer for high-precision testing of spherical surface,” Proc. SPIE 7656, 76560F (2010).
[CrossRef]

Xu, J.

H. Jun, N. Liang, Y. Xun, J. Xu, and W. Fang, “Rigorous accuracy analysis of the fiber point diffraction interferometer,” Proc. SPIE 7155, 71552Z (2008).

Xun, Y.

H. Jun, N. Liang, Y. Xun, J. Xu, and W. Fang, “Rigorous accuracy analysis of the fiber point diffraction interferometer,” Proc. SPIE 7155, 71552Z (2008).

Yamamoto, T.

K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
[CrossRef]

K. Otaki, K. Ota, T. Yamamoto, Y. Fukuda, I. Nishiyama, and S. Okazaki, “Accuracy evaluation of point diffraction interferometer for EUVL mirror,” in Microprocesses and Nanotechnology 2001, Digest of Papers (Business Center or Academic Societies Japan, 2001), pp. 290–291.

Yamazoe, K.

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

Yang, Y.

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces,” Appl. Opt. 50, 2342–2348 (2011).
[CrossRef]

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Polarization point-diffraction interferometer for high-precision testing of spherical surface,” Proc. SPIE 7656, 76560F (2010).
[CrossRef]

Zhu, Y.

K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
[CrossRef]

Zhuo, Y.

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces,” Appl. Opt. 50, 2342–2348 (2011).
[CrossRef]

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Polarization point-diffraction interferometer for high-precision testing of spherical surface,” Proc. SPIE 7656, 76560F (2010).
[CrossRef]

Appl. Opt. (1)

J. Vac. Sci. Technol. B (1)

Y. Sekine, A. Suzuki, M. Hasegawa, C. Ouchi, S. Hara, T. Hasegawa, Y. Kuramoto, and S. Kato, “Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers,” J. Vac. Sci. Technol. B 22, 104–108 (2004).
[CrossRef]

Meas. Sci. Technol. (1)

H. Kihm and Y.-W. Lee, “Double-pass point diffraction interferometer,” Meas. Sci. Technol. 21, 105307 (2010).
[CrossRef]

OSA Trends Opt. Photonics Ser. (1)

K. A. Goldberg, E. Tejnil, and J. Bokor, “A 3-D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry,” OSA Trends Opt. Photonics Ser. 4, 133–137 (1996).

Proc. AIP (1)

P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “The EUV phase-shifting point diffraction interferometer,” Proc. AIP 521, 66–72 (2000).

Proc. SPIE (8)

L. F. Chen and D. G. Sha, “Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer,” Proc. SPIE 6834, 68342N (2008).
[CrossRef]

H. Jun, N. Liang, Y. Xun, J. Xu, and W. Fang, “Rigorous accuracy analysis of the fiber point diffraction interferometer,” Proc. SPIE 7155, 71552Z (2008).

K. Otaki, F. Bonneau, and Y. Ichihara, “Absolute measurement of spherical surface by point diffraction interferometer,” Proc. SPIE 3740, 602–605 (1999).
[CrossRef]

K. Otaki, Y. Zhu, M. Ishii, S. Nakayama, K. Murakami, and T. Gemma, “Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL,” Proc. SPIE 5193, 182–190 (2003).
[CrossRef]

D. Wang, Y. Yang, C. Chen, and Y. Zhuo, “Polarization point-diffraction interferometer for high-precision testing of spherical surface,” Proc. SPIE 7656, 76560F (2010).
[CrossRef]

K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama, and S. Okazaki, “Advanced point diffraction interferometer for EUV aspherical mirrors,” Proc. SPIE 4343, 543–550 (2001).
[CrossRef]

S. Takeuchi, O. Kakuchi, K. Yamazoe, Y. Gomei, T. A. Decker, M. A. Johnson, D. W. Phillion, and J. S. Taylor, “Visible light point-diffraction interferometer for testing of EUVL optics,” Proc. SPIE 6151, 61510E (2006).
[CrossRef]

M. A. Johnson, D. W. Phillion, G. E. Sommargren, T. A. Decker, J. S. Taylor, Y. Gomei, O. Kakuchi, and S. Takeuchi, “Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems,” Proc. SPIE 5869, 58690P (2005).
[CrossRef]

Other (2)

J. A. Kong, Electromagnetic Wave Theory (Wiley, 1986).

K. Otaki, K. Ota, T. Yamamoto, Y. Fukuda, I. Nishiyama, and S. Okazaki, “Accuracy evaluation of point diffraction interferometer for EUVL mirror,” in Microprocesses and Nanotechnology 2001, Digest of Papers (Business Center or Academic Societies Japan, 2001), pp. 290–291.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (11)

Fig. 1.
Fig. 1.

System layout of the PPDI.

Fig. 2.
Fig. 2.

Procedure for simulation of pinhole-diffraction wavefront sphericity.

Fig. 3.
Fig. 3.

SEM photo of FIBE-etched pinhole of 1 μm diameter.

Fig. 4.
Fig. 4.

Simulation model for pinhole diffraction in FDTD analysis.

Fig. 5.
Fig. 5.

Comparison of simulation results obtained with FDTD method, RCW method, and scalar diffraction theory.

Fig. 6.
Fig. 6.

Near-field distribution of pinhole-diffraction wavefront. (a) Amplitude and (b) phase distribution with 0.5 μm diameter pinhole; (c) amplitude and (d) phase distribution with 1 μm diameter pinhole.

Fig. 7.
Fig. 7.

Diffraction wavefront error over various NAs for different pinhole diameters.

Fig. 8.
Fig. 8.

Diffraction wavefront error under various film thicknesses.

Fig. 9.
Fig. 9.

Airy disk captured in the experiment.

Fig. 10.
Fig. 10.

Light transmittances corresponding to various pinhole sizes: (a) 5 μm and (b) 3 μm.

Fig. 11.
Fig. 11.

Measured surface error of the test spherical surface. Surface errors obtained (a) with a ZYGO interferometer, (b) from the PDI system with 3 μm diameter pinhole, and (c) from that with 1 μm diameter pinhole.

Tables (3)

Tables Icon

Table 1. Light Transmittances Corresponding to Various BWs

Tables Icon

Table 2. Aperture Angle Corresponding to Airy Disk in the Experiment

Tables Icon

Table 3. Experimental Results of Spherical Surface Testing

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

Δt1c11(Δx)2+1(Δy)2+1(Δz)2,
Δx,Δy,Δzλ10,
{Δx=Δy=Δz=Δl=λ/40Δt=Δl/(2c),

Metrics