Abstract

We report a method for calibrating an extreme ultraviolet spectrometer based on a flat-field grazing incidence spherical grating in the energy range of 20–30 eV. By measuring absorption lines corresponding to singly excited states in helium atoms and autoionizing states in argon atoms, the photon energy of the detected light was determined. The spectral resolution of the spectrometer, 60 meV, was obtained by deconvolving the Fano resonance profile of argon autoionizing states from the measured absorption line profiles.

© 2013 Optical Society of America

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