W. Song, F. Wu, X. Hou, G. Wu, B. Liu, and Y. Wan, “Absolute calibration of spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm,” Opt. Eng. 52, 336011 (2013).

W. Song, X. Hou, F. Wu, and Y. Wan, “Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method,” Appl. Opt. 52, 5974–5978 (2013).

[CrossRef]

I. Fujimoto, T. Takatsuji, K. Nishimura, and M. Y. Kim, “Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface,” Appl. Opt. 51, 4754–4767 (2012).

[CrossRef]

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[CrossRef]

W. Song, F. Wu, and X. Hou, “Method to test rotationally asymmetric surface deviation with high accuracy,” Appl. Opt. 51, 5567–5572 (2012).

[CrossRef]

J. A. Soons and U. Griesmann, “Absolute interferometric tests of spherical surfaces based on rotational and translational shears,” Proc. SPIE 8493, 84930G (2012).

[CrossRef]

X. Hou, P. Yang, F. Wu, and Y. Wan, “Comparative experimental study on absolute measurement of spherical surface with two-sphere method,” Opt. Lasers Eng. 49, 833–840 (2011).

[CrossRef]

K. Otaki, T. Yamamoto, and Y. Fukuda, “Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror,” J. Vac. Sci. Technol. B 20, 295–300 (2002).

[CrossRef]

B. Dörband and G. Seitz, “Interferometric testing of optical surfaces at its current limit,” Optik 112, 392–398 (2001).

[CrossRef]

B. Dörband and G. Seitz, “Interferometric testing of optical surfaces at its current limit,” Optik 112, 392–398 (2001).

[CrossRef]

K. Otaki, T. Yamamoto, and Y. Fukuda, “Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror,” J. Vac. Sci. Technol. B 20, 295–300 (2002).

[CrossRef]

J. A. Soons and U. Griesmann, “Absolute interferometric tests of spherical surfaces based on rotational and translational shears,” Proc. SPIE 8493, 84930G (2012).

[CrossRef]

W. Song, F. Wu, X. Hou, G. Wu, B. Liu, and Y. Wan, “Absolute calibration of spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm,” Opt. Eng. 52, 336011 (2013).

W. Song, X. Hou, F. Wu, and Y. Wan, “Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method,” Appl. Opt. 52, 5974–5978 (2013).

[CrossRef]

W. Song, F. Wu, and X. Hou, “Method to test rotationally asymmetric surface deviation with high accuracy,” Appl. Opt. 51, 5567–5572 (2012).

[CrossRef]

X. Hou, P. Yang, F. Wu, and Y. Wan, “Comparative experimental study on absolute measurement of spherical surface with two-sphere method,” Opt. Lasers Eng. 49, 833–840 (2011).

[CrossRef]

H. Ichikawa and T. Yamamoto, “Apparatus and method for wavefront absolute calibration and method of synthesizing wavefronts,” U.S. patent5,982,490 (9November1999).

W. Song, F. Wu, X. Hou, G. Wu, B. Liu, and Y. Wan, “Absolute calibration of spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm,” Opt. Eng. 52, 336011 (2013).

K. Otaki, T. Yamamoto, and Y. Fukuda, “Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror,” J. Vac. Sci. Technol. B 20, 295–300 (2002).

[CrossRef]

B. Dörband and G. Seitz, “Interferometric testing of optical surfaces at its current limit,” Optik 112, 392–398 (2001).

[CrossRef]

W. Song, F. Wu, X. Hou, G. Wu, B. Liu, and Y. Wan, “Absolute calibration of spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm,” Opt. Eng. 52, 336011 (2013).

W. Song, X. Hou, F. Wu, and Y. Wan, “Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method,” Appl. Opt. 52, 5974–5978 (2013).

[CrossRef]

W. Song, F. Wu, and X. Hou, “Method to test rotationally asymmetric surface deviation with high accuracy,” Appl. Opt. 51, 5567–5572 (2012).

[CrossRef]

J. A. Soons and U. Griesmann, “Absolute interferometric tests of spherical surfaces based on rotational and translational shears,” Proc. SPIE 8493, 84930G (2012).

[CrossRef]

W. Song, X. Hou, F. Wu, and Y. Wan, “Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method,” Appl. Opt. 52, 5974–5978 (2013).

[CrossRef]

W. Song, F. Wu, X. Hou, G. Wu, B. Liu, and Y. Wan, “Absolute calibration of spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm,” Opt. Eng. 52, 336011 (2013).

X. Hou, P. Yang, F. Wu, and Y. Wan, “Comparative experimental study on absolute measurement of spherical surface with two-sphere method,” Opt. Lasers Eng. 49, 833–840 (2011).

[CrossRef]

W. Song, F. Wu, X. Hou, G. Wu, B. Liu, and Y. Wan, “Absolute calibration of spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm,” Opt. Eng. 52, 336011 (2013).

W. Song, X. Hou, F. Wu, and Y. Wan, “Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method,” Appl. Opt. 52, 5974–5978 (2013).

[CrossRef]

W. Song, F. Wu, and X. Hou, “Method to test rotationally asymmetric surface deviation with high accuracy,” Appl. Opt. 51, 5567–5572 (2012).

[CrossRef]

X. Hou, P. Yang, F. Wu, and Y. Wan, “Comparative experimental study on absolute measurement of spherical surface with two-sphere method,” Opt. Lasers Eng. 49, 833–840 (2011).

[CrossRef]

W. Song, F. Wu, X. Hou, G. Wu, B. Liu, and Y. Wan, “Absolute calibration of spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm,” Opt. Eng. 52, 336011 (2013).

K. Otaki, T. Yamamoto, and Y. Fukuda, “Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror,” J. Vac. Sci. Technol. B 20, 295–300 (2002).

[CrossRef]

H. Ichikawa and T. Yamamoto, “Apparatus and method for wavefront absolute calibration and method of synthesizing wavefronts,” U.S. patent5,982,490 (9November1999).

X. Hou, P. Yang, F. Wu, and Y. Wan, “Comparative experimental study on absolute measurement of spherical surface with two-sphere method,” Opt. Lasers Eng. 49, 833–840 (2011).

[CrossRef]

I. Fujimoto, T. Takatsuji, K. Nishimura, and M. Y. Kim, “Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface,” Appl. Opt. 51, 4754–4767 (2012).

[CrossRef]

W. Song, X. Hou, F. Wu, and Y. Wan, “Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method,” Appl. Opt. 52, 5974–5978 (2013).

[CrossRef]

C. J. Evans and R. N. Kestner, “Test optics error removal,” Appl. Opt. 35, 1015–1021 (1996).

[CrossRef]

W. Song, F. Wu, and X. Hou, “Method to test rotationally asymmetric surface deviation with high accuracy,” Appl. Opt. 51, 5567–5572 (2012).

[CrossRef]

K. Otaki, T. Yamamoto, and Y. Fukuda, “Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror,” J. Vac. Sci. Technol. B 20, 295–300 (2002).

[CrossRef]

W. Song, F. Wu, X. Hou, G. Wu, B. Liu, and Y. Wan, “Absolute calibration of spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm,” Opt. Eng. 52, 336011 (2013).

X. Hou, P. Yang, F. Wu, and Y. Wan, “Comparative experimental study on absolute measurement of spherical surface with two-sphere method,” Opt. Lasers Eng. 49, 833–840 (2011).

[CrossRef]

B. Dörband and G. Seitz, “Interferometric testing of optical surfaces at its current limit,” Optik 112, 392–398 (2001).

[CrossRef]

J. A. Soons and U. Griesmann, “Absolute interferometric tests of spherical surfaces based on rotational and translational shears,” Proc. SPIE 8493, 84930G (2012).

[CrossRef]

H. Ichikawa and T. Yamamoto, “Apparatus and method for wavefront absolute calibration and method of synthesizing wavefronts,” U.S. patent5,982,490 (9November1999).