Abstract

The absolute testing method of shift-rotation that combines the traditional $N$-position method and Zernike polynomial fitting has been commonly employed in surface metrology. It preserves the high spatial frequency of the surface deviation with the $N$-position method to obtain the rotationally asymmetric surface deviation, but it suffers the $kN\theta$ order angular terms errors missed by the $N$-position method when it calculates the rotationally symmetric surface deviation with the Zernike rotationally symmetric polynomial fitting method. An optimized absolute testing method of shift-rotation is presented in this paper. It considers the missing $kN\theta$ order errors when the equations of the rotationally symmetric surface deviation are solved. As a result, it is more accurate than the traditional method. Experimental absolute results of spherical surfaces are given.

© 2013 Optical Society of America

Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method

W. Song, X. Hou, F. Wu, and Y. Wan
Appl. Opt. 52(24) 5974-5978 (2013)

Method to test rotationally asymmetric surface deviation with high accuracy

Weihong Song, Fan Wu, and Xi Hou
Appl. Opt. 51(22) 5567-5572 (2012)

Error correction for rotationally asymmetric surface deviation testing based on rotational shears

Weibo Wang, Pengfei Liu, Yaolong Xing, Jiubin Tan, and Jian Liu
Appl. Opt. 55(26) 7428-7433 (2016)

Extended shift-rotation method for absolute interferometric testing of a spherical surface with pixel-level spatial resolution

Yu Liu, Liang Miao, Wenlong Zhang, Chunshui Jin, and Haitao Zhang
Appl. Opt. 56(16) 4886-4891 (2017)

Absolute testing method of shift-rotation based on the influence function

Xiaochuan Hu, Shuai Zhang, Xi Hou, and Gaofeng Wu
Appl. Opt. 60(13) 3808-3815 (2021)