Abstract

In an effort to optimize the hydrodynamic radial (HyDRa) polishing process for applications where the amount of material that has to be removed implies long polishing times, we have developed a method to determine the optimum correction fraction that has to be made for a given error map, in terms of the level of determinism of the process, the number of iterations, and their associated polishing runs as well as run times.

© 2013 Optical Society of America

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